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Thermal oxidation as a key technology for high efficiency screen printed industrial silicon solar cells

 
: Biro, D.; Mack, S.; Wolf, A.; Lemke, A.; Belledin, U.; Erath, D.; Holzinger, B.; Wotke, E.A.; Hofmann, M.; Gautero, L.; Nold, S.; Rentsch, J.; Preu, R.

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Postprint urn:nbn:de:0011-n-1720737 (114 KByte PDF)
MD5 Fingerprint: 2e4d1557073592e9233f8e182833b22e
© 2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
Created on: 31.8.2012


Institute of Electrical and Electronics Engineers -IEEE-; IEEE Electron Devices Society:
34th IEEE Photovoltaic Specialists Conference, PVSC 2009. Vol.2 : Philadelphia, Pennsylvania, USA, 7 - 12 June 2009
Piscataway/NJ: IEEE, 2009
ISBN: 978-1-4244-2949-3
ISBN: 1-4244-2949-8
ISBN: 978-1-4244-2950-9
pp.1594-1599
Photovoltaic Specialists Conference (PVSC) <34, 2009, Philadelphia/Pa.>
English
Conference Paper, Electronic Publication
Fraunhofer ISE ()

Abstract
In this paper various options to integrate thermal oxidation into industrial cell production are presented, maintaining large parts of the standard cell fabrication process. Both the use of thin (15 nm) and thick (200 nm) wet thermally grown oxides are successfully implemented into pilot production at the Fraunhofer production research platform PV-TEC [1]. Solar cells are fabricated with both type of processes. On large area (149mm 2) Cz-Si substrates 18% efficiency have been achieved. Furthermore a cost calculation including process and equipment improvements is carried out for the thermal oxidation process and it is shown that the cost for such a process can be well below 10ct per wafer for thick and below 5 ct per wafer for a thin oxide, thus meeting industrial requirements for cost effective production.

: http://publica.fraunhofer.de/documents/N-172073.html