Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2021240-GHz Reflectometer-Based Dielectric Sensor with Integrated Transducers in a 130-nm SiGe BiCMOS Technology
Wang, D.; Eissa, M.H.; Schmalz, K.; Kämpfe, T.; Kissinger, D.
Journal Article
2021A 61-GHz Rectifier Using Internal Voltage Cancellation and Body-Biasing Techniques in 22-nm FDSOI
Harutyunyan, A.; Landwehr, M.
Journal Article
2021A 61-GHz RFID frontend with SiGe transceiver MMIC and SIW coupling network
Funke, Dominic A.; Hansen, Steffen; Bredendiek, Christian; Grenter, Thorben; Bögel, Gerd vom; Harutyunyan, Armen; Fiedler, Raik; Heinig, Andreas; Pohl, Nils
Conference Paper
2021Aging in Ferroelectric Si-Doped Hafnium Oxide Thin Films
Mart, C.; Kohlenbach, N.-D.; Kühnel, K.; Eßlinger, S.; Czernohorsky, M.; Ali, T.; Weinreich, W.; Eng, L.M.
Journal Article
2021All-silicon ultrasonic recognition of the environment
Kaiser, Bert
Presentation
2021Analog Spatial Light Modulators Based on Micromirror Arrays
Dauderstädt, U.; Dürr, P.; Gehner, A.; Wagner, M.; Schenk, H.
Journal Article
2021Challenges of monolithic MEMS-on-CMOS integration for spatial light modulators
Hohle, C.; Döring, S.; Friedrichs, M.; Gehner, A.; Rudloff, D.; Schulze, M.; Stübner, R.; Trenkler, D.
Conference Paper
2021Comparison of Analog and Noise Performance between Buried Channel versus Surface Devices in HKMG I/O Devices
Pirro, L.; Jayakumar, A.; Zimmerhackl, O.; Lipp, D.; Illgen, R.; Muehlhoff, A.; Pfuetzner, R.; Zaka, A.; Otto, M.; Hoentschel, J.; Raffel, Y.; Seidel, K.; Olivo, R.
Conference Paper
2021Coulomb-actuated microbeams revisited: Experimental and numerical modal decomposition of the saddle-node bifurcation
Melnikov, A.; Schenk, H.A.G.; Monsalve, J.M.; Wall, F.; Stolz, M.; Mrosk, A.; Langa, S.; Kaiser, B.
Journal Article
2021Doping concentration dependent piezoelectric behavior of Si:HfO2 thin-films
Kirbach, S.; Lederer, M.; Eßlinger, S.; Mart, C.; Czernohorsky, M.; Weinreich, W.; Wallmersperger, T.
Journal Article
2021Drahtloser Datenbus
Schneider, Tobias; Kirrbach, René; Faulwaßer, Michael; Noack, Alexander
Patent
2021Empirical Large-Signal Modeling of mm-Wave FDSOI CMOS Based on Angelov Model
Le, Q.H.; Huynh, D.K.; Lehmann, S.; Zhao, Z.; Kämpfe, T.; Rudolph, M.
Journal Article
2021Enhanced pyroelectric response at morphotropic and field-induced phase transitions in ferroelectric hafnium oxide thin films
Mart, C.; Kämpfe, T.; Kühnel, K.; Czernohorsky, M.; Kolodinski, S.; Wiatr, M.; Weinreich, W.; Eng, L.M.
Journal Article
2021Ferroelectric Field Effect Transistors as a Synapse for Neuromorphic Application
Lederer, M.; Kämpfe, T.; Ali, T.; Müller, F.; Olivo, R.; Hoffmann, R.; Laleni, N.; Seidel, K.
Journal Article
2021Ferroelektrischer Dünnschichttransistor und Verfahren zum Herstellen eines ferroelektrischen Dünnschichttransistors
Ali, Tarek Nadi Ismail; Polakowski, Patrick; Seidel, Konrad
Patent
2021A Fully Integrated Ferroelectric Thin-Film-Transistor - Influence of Device Scaling on Threshold Voltage Compensation in Displays
Lehninger, D.; Ellinger, M.; Ali, T.; Li, S.; Mertens, K.; Lederer, M.; Olivio, R.; Kampfe, T.; Hanisch, N.; Biedermann, K.; Rudolph, M.; Brackmann, V.; Sanctis, C.; Jank, M.; Seidel, K.
Journal Article
2021Impact of the Nonlinear Dielectric Hysteresis Properties of a Charge Trap Layer in a Novel Hybrid High-Speed and Low-Power Ferroelectric or Antiferroelectric HSO/HZO Boosted Charge Trap Memory
Ali, T.; Mertens, K.; Olivo, R.; Rudolph, M.; Oehler, S.; Kuhnel, K.; Lehninger, D.; Muller, F.; Hoffmann, R.; Schramm, P.; Biedermann, K.; Metzger, J.; Binder, R.; Czernohorsky, M.; Kampfe, T.; Muller, J.; Seidel, K.; Houdt, J. Van; Eng, L.M.
Journal Article
2021Impact of the SiO2 interface layer on the crystallographic texture of ferroelectric hafnium oxide
Lederer, M.; Reck, A.; Mertens, K.; Olivo, R.; Bagul, P.; Kia, A.; Volkmann, B.; Kämpfe, T.; Seidel, K.; Eng, L.M.
Journal Article
2021Kinetics of the Light and Elevated Temperature Induced Degradation and Regeneration of Quasi-Monocrystalline Silicon Solar Cells
Wehmeier, N.; Fischer, G.; Herlufsen, S.; Wolny, F.; Wagner, M.; Bothe, K.; Müller, M.
Journal Article
2021MEMS component with in-plane movable element and method for operating same
Kaiser, Bert
Patent
2021MEMS component, assembly comprising the MEMS component and method for operating the MEMS component
Kaiser, Bert; Monsalve Guaracao, Jorge Mario; Conrad, Holger
Patent
2021MEMS-Aktuator und MEMS-Aktuator-Array mit einer Mehrzahl von MEMS-Aktuatoren
Dürr, Peter
Patent
2021MEMS-Aktuator-Element und MEMS-Aktuator-Array mit einer Mehrzahl von MEMS-Aktuator-Elementen
Dürr, Peter; Neudert, Andreas; Felsberg, Linda
Patent
2021Method for controlling a driver circuit, driver circuit, system comprising a driver circuit and method for manufacturing an integrated circuit
Fiedler, Raik; Pietzsch, Marcus
Patent
2021Multi‐Level Switching and Reversible Current Driven Domain‐Wall Motion in Single CoFeB/MgO/CoFeB‐Based Perpendicular Magnetic Tunnel Junctions
Lv, H.; Fidalgo, J.; Silva, A.V.; Leitao, D.C.; Kämpfe, T.; Langer, J.; Wrona, J.; Ocker, B.; Freitas, P.P.; Cardoso, S.
Journal Article
2021On the Origin of Wake-Up and Antiferroelectric-Like Behavior in Ferroelectric Hafnium Oxide
Lederer, M.; Olivo, R.; Lehninger, D.; Abdulazhanov, S.; Kämpfe, T.; Kirbach, S.; Mart, C.; Seidel, K.; Eng, L.M.
Journal Article
2021Optical microsystems for advanced imaging in biomedicine
Scholles, Michael
Abstract
2021Prozesskette zur Faltmontage für miniaturisierte komplexe Optiksysteme
Grüger, H.; Sdrenka, S.; Stein, K.; Sabiha, M.; Schulz, M.; Ziegmann, G.
Presentation
2021Sensor mit einer Festkörper-Schichtstruktur und Verfahren zur Herstellung eines Sensors
Kurth, Eberhard; Kunath, Christian
Patent
2021SmartSpectrometer - Embedded Optical Spectroscopy for Applications in Agriculture and Industry
Krause, Julius; Grüger, Heinrich; Gebauer, Lucie; Zheng, Xiaorong; Knobbe, Jens; Pügner, Tino; Kicherer, Anna; Gruna, Robin; Längle, Thomas; Beyerer, Jürgen
Journal Article
2021Thermo Optical Phase Shifter with Low Thermal Crosstalk for SOI Strip Waveguide
Sabouri, S.; Mendoza Velasco, L.A.; Catuneanu, M.; Namdari, M.; Jamshidi, K.
Journal Article
2021Validation of Computational Procedures for the Progressive Collapse Analysis of Reinforced Concrete Structures
Dmitriev, A.; Lalin, V.; Melnikov, A.
Conference Paper
2021WS2 and MoS2 counter electrode materials for dye‐sensitized solar cells
Rashidi, S.; Rashidi, S.; Heydari, R.K.; Esmaeili, S.; Tran, N.; Thangi, D.; Wei, W.
Journal Article
2020240-GHz reflectometer with integrated transducer for dielectric spectroscopy in a 130-nm SiGe BiCMOS technology
Wang, D.; Eissa, M.H.; Schmalz, K.; Kämpfe, T.; Kissinger, D.
Conference Paper
2020480-GHz Sensor With Subharmonic Mixer and Integrated Transducer in a 130-nm SiGe BiCMOS Technology
Wang, D.; Eissa, M.H.; Schmalz, K.; Kampfe, T.; Kissinger, D.
Journal Article
20205 mm Range 61 GHz System on Chip EPC Gen2 RFID tag in 22nm FD-SOI Technology
Harutyunyan, A.; Heinig, A.; Fiedler, R.; Landwehr, M.; Hildebrandt, R.; Holland, H.-J.
Conference Paper
2020Acoustic bending converter system and acoustic device
Kaiser, Bert
Patent
2020Analysis of Hot-Carrier Degradation in 22nm FDSOI Transistors Using RF Small-Signal Characteristics
Huynh, D.K.; Le, Q.H.; Duhan, P.; Wang, D.; Kampfe, T.; Rudolph, M.
Conference Paper
2020Analysis of the composition of tantalum nitride in CMOS metallization trenches using parallel angle‐resolved XPS
Wehring, B.; Gerlich, L.; Kia, A.M.; Wislicenus, M.; Uhlig, B.
Journal Article
2020Analysis of the Reliability of Ferroelectric Field Effect Transistors in Combination with Crossbar Circuits for Neuromorphic Computing
Hoffmann, Tudor
: Kämpfe, Thomas (Betreuer); Messaris, Ioannis (Betreuer)
Thesis
2020Antiferroelectric Si:HfO2 for High Energy Storage using 3D MIM Capacitors
Viegas, A.; Mart, C.; Czernohorsky, M.
Conference Paper
2020Automatisierte Berechnung und Visualisierung von Komorbiditätsindizes für den Tumorboard-Entscheid
Wald, T.; Birnbaum, Klemens; Wiegand, S.; Dietz, A.; Zebralla, V.; Wichmann, G.
Journal Article
2020Automatisierte Berechnung und Visualisierung von Komorbiditätsindizes für den Tumorboard-Entscheid
Wald, T.; Birnbaum, K.; Wiegand, S.; Dietz, A.; Zebralla, V.; Wichmann, G.
Journal Article
2020Back-End-of-Line Compatible Low-Temperature Furnace Anneal for Ferroelectric Hafnium Zirconium Oxide Formation
Lehninger, D.; Olivo, R.; Ali, T.; Lederer, M.; Kämpfe, T.; Mart, C.; Biedermann, K.; Kühnel, K.; Roy, L.; Kalkani, M.; Seidel, K.
Journal Article
2020Bauelement und Verfahren zum Herstellen eines Bauelements
Kirbach, Sven; Weinreich, Wenke; Mart, Clemens; Zybell, Sabine; Haufe, Nora
Patent
2020Bending transducer as an actuator, bending transducer as a sensor, bending transducer system
Schenk, Hermann; Kaiser, Bert; Ehrig, Lutz
Patent
2020BEoL Reliability, XPS and REELS Study on low-k Dielectrics to understand Breakdown Mechanisms
Wehring, Bettina; Hoffmann, R.; Gerlich, Lukas; Czernohorsky, Malte; Uhlig, B.; Seidel, R.; Barchewitz, T.; Schlaphof, F.; Meinshausen, L.; Leyens, C.
Conference Paper
2020Chapter 49 - Micro mirrors
Schenk, Harald; Schulze, Matthias
Book Article
2020Development and Characterization of Transition Metal Silicides for Metallization Application
Hamtaei, Sarallah
: Sorgenfrei, Tina; Fiederle, Michael
Master Thesis
2020Development of Rutile Titanium Oxide Thin Films as Battery Material Component Using Atomic Layer Deposition
Kia, A.M.; Bönhardt, S.; Zybell, S.; Kühnel, K.; Haufe, N.; Weinreich, W.
Journal Article
2020Doping Effects in CMOS‐compatible CoSi Thin Films for Thermoelectric and Sensor Applications
Nichenametla, Charan Krishna; Calvo, Jesús; Riedel, Stefan; Gerlich, Lukas; Hindenberg, Meike; Novikov, Sergej; Alexander Burkov; Kozelj, Primoz; Cardoso-Gil, Raul; Wagner-Reetz, Maik
Journal Article
2020Effect of Substrate Implant Tuning on the Performance of MFIS Silicon Doped Hafnium Oxide (HSO) FeFET Memory
Ali, T.; Kühnel, K.; Mertens, K.; Czernohorsky, M.; Rudolph, M.; Duhan, P.; Lehninger, D.; Hoffmann, R.; Steinke, P.; Müller, J.; Houdt, J. van; Seidel, K.; Eng, L.M.
Conference Paper
2020Efficient FeFET crossbar accelerator for binary neural networks
Soliman, T.; Olivo, R.; Kirchner, T.; Parra, C. de la; Lederer, M.; Kämpfe, T.; Guntoro, A.; Wehn, N.
Conference Paper
2020The electrocaloric effect in doped hafnium oxide: Comparison of direct and indirect measurements
Mart, C.; Kämpfe, T.; Czernohorsky, M.; Eßlinger, S.; Kolodinski, S.; Wiatr, M.; Weinreich, W.; Eng, L.M.
Journal Article
2020Energy harvesting in the back-end of line with CMOS compatible ferroelectric hafnium oxide
Mart, C.; Abdulazhanov, S.; Czernohorsky, M.; Kämpfe, T.; Lehninger, D.; Falidas, K.; Eßlinger, S.; Kühnel, K.; Oehler, S.; Rudolph, M.; Wiatr, M.; Kolodinski, S.; Seidel, R.; Weinreich, W.; Eng, L.M.
Conference Paper
2020Entwicklung eines analogen 100MBIT / s-Transceiver-Frontends für die LI-FI-Kommunikation mit harten Echtzeitanforderungen
Jakob, Benjamin
: Kirrbach, René (Betreuer); Fischer, Wolf-Joachim (Betreuer)
Thesis
2020Entwicklung eines Aufbaus für die teilautomatisierte Montage von Mikrospektrometern
Kruse, Jens
: Seelig, D. (Betreuer); Knobbe, J. (Betreuer)
Thesis
2020Entwicklung eines integrierten, digitalen Empfängers für echtzeitfähige, leitungsungebundene, optische Übertragungen
Steinbach, Hagen
: Fitz, R. (Betreuer); Ebberg, A. (Betreuer); Faulwaßer, M. (Betreuer)
Master Thesis
2020Entwurf, Konstruktion und Vorbereitung des Aufbaus eines hochminiaturisierten Gitterspektrometers für den Nahinfrarotbereich
Starcke, Antonia Jasmin
: Beyerlein, Mathias; Grüger, Heinrich
Bachelor Thesis
2020FeFET: A versatile CMOS compatible device with game-changing potential
Beyer, S.; Dünkel, S.; Trentzsch, M.; Müller, J.; Hellmich, A.; Utess, D.; Paul, J.; Kleimaier, D.; Pellerin, J.; Müller, S.; Ocker, J.; Benoist, A.; Zhou, H.; Mennenga, M.; Schuster, M.; Tassan, F.; Noack, M.; Pourkeramati, A.; Müller, F.; Lederer, M.; Ali, T.; Hoffmann, R.; Kämpfe, T.; Seidel, K.; Mulaosmanovic, H.; Breyer, E.T.; Mikolajick, T.; Slesazeck, S.
Conference Paper
2020First time of nanoscopic electrostatic drives pushing for ultrasonic transmission for gesture recognition
Monsalve Guaracao, J.M.; Kircher, M.; Wall, F.; Krenkel, M.; Kaiser, B.; Langa, S.; Schenk, H.
Conference Paper
2020Fraunhofer-Institut für Photonische Mikrosysteme. Jahresbericht 2019
 
Annual Report
2020Furnace annealed HfO2-Films for the Integration of Ferroelectric Functionalities into the BEoL
Lehninger, D.; Ali, T.; Olivo, R.; Lederer, M.; Kämpfe, T.; Mertens, K.; Seidel, K.
Conference Paper
2020Gekrümmte Lichtleiterstruktur, Verfahren zum Herstellen derselben und optisches Überwachungssystem
Schneider, Tobias; Kirrbach, René
Patent
2020Gleichrichter für Millimeter-Wellen-Wechselspannungssignale
Harutyunyan, Armen
Patent
2020Heavy Ion Irradiation Effects on Structural and Ferroelectric Properties of HfO2 Films
Kämpfe, T.; Vogel, T.; Olivo, R.; Lederer, M.; Kaiser, N.; Petzold, S.; Ali, T.; Lehninger, D.; Trautmann, C.; Alff, L.; Seidel, K.
Conference Paper
2020HfO2-based ferroelectric FETs: Performance of single devices and mini-arrays
Mulaosmanovic, H.; Müller, F.; Breyer, E.T.; Dünkel, S.; Trentzsch, M.; Beyer, S.; Mikolajick, T.; Slesazeck, S.
Conference Paper
2020Impact of Channel Implant Variation on RTN and Flicker Noise
Raffel, Y.; Seidel, K.; Pirro, L.; Lehmann, S.; Hoffmann, R.; Olivo, R.; Kämpfe, T.; Heitmann, J.
Conference Paper
2020Impact of Ferroelectric Wakeup on Reliability of Laminate based Si-doped Hafnium Oxide (HSO) FeFET Memory Cells
Ali, T.; Kühnel, K.; Czernohorsky, M.; Rudolph, M.; Pätzold, B.; Olivo, R.; Lehninger, D.; Mertens, K.; Müller, F.; Lederer, M.; Hoffmann, R.; Mart, C.; Kalkani, M.N.; Steinke, P.; Kämpfe, T.; Müller, J.; Houdt, J. van; Seidel, K.; Eng, L.M.
Conference Paper
2020Implementierung und Erprobung einer portablen Sensorplattform auf Basis von RISC-V
Enseleit, Stephan
: Fengler Wolfgang (Betreuer); Weder, Andreas (Betreuer)
Bachelor Thesis
2020Innovative Concept of Tunable ECDLs Based on MEMS in the NIR and MIR Spectral Regime
Hoppe, M.; Rohling, H.; Schmidtmann, S.; Tatenguem, H.; Grahmann, J.; Milde, T.; Schanze, T.; Sacher, J.R.
Conference Paper
2020Integration of Hafnium Oxide on Epitaxial SiGe for p-type Ferroelectric FET Application
Lederer, M.; Müller, F.; Kühnel, K.; Olivo, R.; Mertens, K.; Trentzsch, M.; Dünkel, S.; Müller, J.; Beyer, S.; Seidel, K.; Kämpfe, T.; Eng, L.M.
Journal Article
2020Interplay Between Switching and Retention in HfO2-Based Ferroelectric FETs
Mulaosmanovic, H.; Müller, F.; Lederer, M.; Ali, T.; Hoffmann, R.; Seidel, K.; Zhou, H.; Ocker, J.; Mueller, S.; Dunkel, S.; Kleimaier, D.; Muller, J.; Trentzsch, M.; Beyer, S.; Breyer, E.T.; Mikolajick, T.; Slesazeck, S.
Journal Article
2020Kundenakquise öffentlicher Forschungseinrichtungen in Deutschland. Eine explorative Fallstudie zum Einfluss von Kommunikationskanälen bei der Vermarktung von F&E Dienstleistungen
Grebe, Steffen
: Schefczyk, Michael (Betreuer); Ernst, Cornelia (Betreuer); Titze, Stephan (Betreuer)
Thesis
2020Mechanische gekoppelte mikroelektromechanische Ultraschallwandler
Krenkel, Marcel
: Richter, A. (Betreuer); Gerlach, G. (Betreuer)
Dissertation
2020Mikromechanische Struktur, mikromechanisches System und Verfahren zum Bereitstellen einer mikromechanischen Struktur
Drabe, Christian; Dreyhaupt, André
Patent
2020Minimization of nonlinearities in nano electrostatic drive actuators using validated coupled-field simulation
Melnikov, Anton; Schenk, Hermann; Wall, Franziska; Spitz, B.; Ehrig, L.; Langa, S.; Stolz, M.; Kaiser, B.; Conrad, H.; Schenk, H.
Conference Paper
2020Modellierung eines Li-Fi Transceivers zur optischen Freiraumdatenübertragung
Rödel, Jan
: Kirrbach, Rene (Betreuer); Engelbrecht, Rainer (Betreuer)
Bachelor Thesis
2020Modelling of three dimensional deep trench capacitors and identification of parasitic elements
Agarwal, Rishabh
: Czernohorsky, Malte (Betreuer); Lakner, Hubert (Betreuer); Bartha, J.W. (Betreuer)
Master Thesis
2020Monolitic Hybrid Transmitter-Receiver Lens for Rotary On-Axis Communications
Kirrbach, R.; Faulwaßer, M.; Schneider, T.; Meißner, P.; Noack, A.; Deicke, F.
Journal Article
2020Novel CMOS-integrated 512x320 tip-tilt micro mirror array and related technology platform
Gehner, Andreas; Döring, S.; Rudloff, D.; Kunze, D.; Dürr, P.; Francés, S.; Hänsel, L.; Torlee, H.; Elgner, A.; Eckert, M.; Friedrichs, M.; Heber, J.; Schmidt, J.; Pufe, W.; Hohle, C.; Schulze, M.; Wagner, M.
Conference Paper
2020Obtaining Patient-Reported Outcomes Electronically with "OncoFunction" in Head and Neck Cancer Patients During Aftercare
Zebralla, Veit; Müller, Juliane; Wald, Theresa; Boehm, Andreas; Wichmann, Gunnar; Berger, Thomas; Birnbaum, Klemens; Heuermann, Katherina; Oeltze-Jafra, Steffen; Neumuth, Thomas; Singer, Susanne; Büttner, Matthias; Dietz, Andreas; Wiegand, Susanne
Journal Article
2020Passiv arbeitender Transponder mit sensitiver Funktionalität
Holland, Hans-Jürgen
Patent
2020Phase formation of a biocompatible Ti-based alloy under kinetic constraints studied via in-situ high-energy X-ray diffraction
Kosiba, K.; Rothkirch, A.; Han, J.; Deng, L.; Escher, B.; Wang, G.; Kühn, U.; Bednarcik, J.
Journal Article
2020Piezoelectric Response of Polycrystalline Silicon-Doped Hafnium Oxide Thin Films Determined by Rapid Temperature Cycles
Mart, Clemens; Kämpfe, Thomas; Hoffmann, Raik; Eßlinger, Sophia; Kirbach, Sven; Kühnel, Kati; Czernohorsky, Malte; Eng, Lukas M.; Weinreich, Wenke
Journal Article
2020Quantifying non-centrosymmetric orthorhombic phase fraction in 10 nm ferroelectric Hf0.5Zr0.5O2 films
Mukundan, V.; Consiglio, S.; Triyoso, D.H.; Tapily, K.; Schujman, S.; Mart, C.; Kämpfe, T.; Weinreich, W.; Jordan-Sweet, J.; Clark, R.D.; Leusink, G.J.; Diebold, A.C.
Journal Article
2020Reconfigurable Acoustic Metagrating for High-Efficiency Anomalous Reflection
Chiang, Y.K.; Oberst, S.; Melnikov, A.; Quan, L.; Marburg, S.; Alù, A.; Powell, D.A.
Journal Article
2020Rührer zur drahtlosen und/oder batterielosen Messung von Prozessparametern
Weder, Andreas; Heinig, Andreas
Patent
2020Schöne neue Welt?
Ruffert, Christine
Book Article
2020Sem image denoising and contour image estimation using deep learning
Chaudhary, N.; Savari, S.A.; Brackmann, V.; Friedrich, M.
Conference Paper
2020Silicon-based microfluid control and switching valves using lateral electrostatic bending actuators
Uhlig, Sebastian; Gaudet, Matthieu; Langa, Sergiu; Ruffert, Christine; Conrad, Holger; Schenk, Harald
Report
2020Spannungskontrollierbarer Kondensator mit ferroelektrischer Schicht und Verfahren zum Herstellen des spannungskontrollierbaren Kondensators mit ferroelektrischer Schicht
Kämpfe, Thomas; Polakowski, Patrick; Seidel, Konrad
Patent
2020Spannungskontrollierbarer Kondensator und Verfahren zum Herstellen eines spannungskontrollierbaren Kondensators
Kämpfe, Thomas; Polakowski, Patrick; Seidel, Konrad
Patent
2020Structural and Electrical Comparison of Si and Zr Doped Hafnium Oxide Thin Films and Integrated FeFETs Utilizing Transmission Kikuchi Diffraction
Lederer, M.; Kämpfe, T.; Vogel, N.; Utess, D.; Volkmann, B.; Ali, T.; Olivo, R.; Müller, J.; Beyer, S.; Trentzsch, M.; Seidel, K.; Eng, L.M.
Journal Article
2020A Study on the Temperature-Dependent Operation of Fluorite-Structure-Based Ferroelectric HfO2 Memory FeFET: Pyroelectricity and Reliability
Ali, T.; Kühnel, K.; Czernohorsky, M.; Mart, C.; Rudolph, M.; Pätzold, B.; Lehninger, D.; Olivo, R.; Lederer, M.; Müller, F.; Hoffmann, R.; Metzger, J.; Binder, R.; Steinke, P.; Kämpfe, T.; Müller, J.; Seidel, K.; Eng, L.M.
Journal Article
2020A Study on the Temperature-Dependent Operation of Fluorite-Structure-Based Ferroelectric HfO2 Memory FeFET: A Temperature-Modulated Operation
Ali, T.; Kühnel, K.; Czernohorsky, M.; Mart, C.; Rudolph, M.; Pätzold, B.; Lederer, M.; Olivo, R.; Lehninger, D.; Müller, F.; Hoffmann, R.; Metzger, J.; Binder, R.; Steinke, P.; Kämpfe, T.; Müller, J.; Seidel, K.; Eng, L.M.
Journal Article
2020Surface Dependent Performance of Ultrathin TiN Films as an Electrically Conducting Li Diffusion Barrier for Li-Ion Based Devices
Speulmanns, Jan; Kia, Alireza M.; Kühnel, Kati; Bönhardt, Sascha; Weinreich, Wenke
Journal Article
2020System integration of hybrid large aperture micro scanner array for fast scanning LiDAR sensors
Sandner, Thilo; Graßhoff, Thomas; Owe, Wolf-Dietrich; Herrmann, A.; Wildenhain, M.; Schwarzenberg, M.
Conference Paper
2020Tunable non-volatile memory by conductive ferroelectric domain walls in lithium niobate thin films
Kämpfe, T.; Wang, B.; Haußmann, A.; Chen, L.-Q.; Eng, L.M.
Journal Article
2020Ultra-Low PoweR TechnologIes and MEmory architectures for IoT
Seidel, Konrad; Eichler, Uwe
Report
2020Untersuchung des Verhaltens von MEMS-Lautsprechern auf mechanischen Schockbelastung
Kulas, Michalina
: Schenk, Harald (Betreuer); Kahmen, Gerhard (Betreuer)
Bachelor Thesis
2020Verfahren zur Authentifizierung eines Nutzers und Authentifizierungssystem
Noack, Alexander
Patent
2020Verpackung mit Transponder und Kryptomodul
Holland, Hans-Jürgen
Patent
2020Vibration analysis of micro mirrors for LIDAR using on-chip piezo-resistive sensor
Grahmann, Jan; Schroedter, R.; Kiethe, Oliver; Todt, Ulrich
Conference Paper
2020Vorrichtung und Netzwerk zur drahtlosen, optischen Kommunikation
Kirrbach, René; Schneider, Tobias; Noack, Alexander; Faulwaßer, Michael; Deicke, Frank
Patent
2020W-Band Noise Characterization with Back-Gate Effects for Advanced 22nm FDSOI mm-Wave MOSFETs
Le, Q.H.; Huynh, D.K.; Wang, D.; Zhao, Z.; Lehmann, S.; Kämpfe, T.; Rudolph, M.
Conference Paper
2020Wafer-level vacuum-packaged translatory MEMS actuator with large stroke for NIR-FT spectrometers
Sandner, Thilo; Gaumont, Eric; Graßhoff, Thomas; Rieck, Andreas; Seifert, T.; Auböck, Gerald; Grahmann, Jan
Journal Article
2020Whether Ge-Rich ZrO2 and Ge-Rich HfO2 Materials Have Similar Reaction on Annealing Treatment?
Khomenkova, L.; Lehninger, D.; Agocs, E.; Petrik, P.; Portier, X.; Korsunska, N.; Melnichuk, O.; Gourbilleau, F.; Heitmann, J.
Conference Paper
2020Wide and fast mode-hop free MEMS tunable ECDL concept and realization in the NIR and MIR spectral regime
Hoppe, M.; Rohling, H.; Schmidtmann, S.; Honsberg, M.; Tatenguem, H.; Grahmann, J.; Milde, T.; Schanze, T.; Sacher, J.R.
Conference Paper
2019240-GHz Four-Channel Power-Tuning Heterodyne Sensing Readout System with Reflection and Transmission Measurements in a 130-nm SiGe BiCMOS Technology
Wang, D.; Eissa, M.H.; Schmalz, K.; Yun, J.; Malignaggi, A.; Borngräber, J.; Kucharski, M.; Kämpfe, T.; Seidel, K.; Ng, H.J.; Kissinger, D.
Journal Article
2019Acoustic Validation of Electrostatic All-Silicon MEMS-Speakers
Ehrig, Lutz; Kaiser, Bert; Schenk, Hermann A.G.; Stolz, Michael; Langa, Sergiu; Conrad, Holger; Schenk, Harald; Männchen, Andreas; Brocks, Tobias
Conference Paper
2019Advances in MOEMS-based external cavity QCLs
Flores, Y.V.; Haertelt, M.; Hugger, S.; Butschek, L.; Schilling, C.; Merten, A.; Schwarzenberg, M.; Dreyhaupt, A.; Grahmann, J.; Rattunde, M.; Ostendorf, R.
Conference Paper
2019Advances of MOEMS-based external cavity QCLs
Härtelt, Marko; Hugger, Stefan; Butschek, Lorenz; Schilling, Christian; Merten, André; Schwarzenberg, Markus; Dreyhaupt, André; Grahmann, Jan; Rattunde, Marcel; Ostendorf, Ralf
Conference Paper
2019Analysis of CMOS Metallization Trenches using Angle-Resolved XPS
Wehring, Bettina; Gerlich, Lukas; Wislicenus, Marcus
Poster
2019The annealing effect on memory state stability and interlayer coupling in perpendicular magnetic tunnel junctions with ultrathin MgO barrier
Lv, Hua; Fidalgo, João; Leitão, Diana C.; Silva, Ana V.; Kämpfe, Thomas; Riedel, Stefan; Langer, Juergen; Wrona, Jerzy; Ocker, Berthold; Freitas, Paolo P.; Cardoso, Susana
Journal Article
2019Antiferroelektrische, eingebettete Dünnschichtkondensatoren als Energiespeicher für autarke Sensorelemente
Czernohorsky, Malte; Weder, Andreas; Mart, Clemens; Falidas, K.; Kühnel, K.; Viegas, A.E.; Holland, H.-J.; Weinreich, W.
Conference Paper
2019Assessment of a thick-oxide transistor from the 22FDX® platform for 5G NR sub-6 GHz FEMs
Le, Q.H.; Huynh, D.K.; Wang, D.; Kampfe, T.; Zhao, Z.; Lehmann, S.
Conference Paper
2019Assessment of conduction mechanisms through MgO ultrathin barriers in CoFeB/MgO/CoFeB perpendicular magnetic tunnel junctions
Lv, Hua; Fidalgo, João; Silva, Ana V.; Leitão, Diana C.; Kämpfe, Thomas; Riedel, Stefan; Langer, Juergen; Wrona, Jerzy; Ocker, Berthold; Freitas, Paolo P.; Cardoso, Susana
Journal Article
2019Audio-transducer for in-ear-applications based on CMOS-compatible electrostatic actuators
Spitz, B.; Wall, F.; Schenk, H.A.G.; Melnikov, A.; Ehrig, L.; Langa, S.; Stolz, M.; Kaiser, B.; Conrad, H.; Schenk, H.
Conference Paper
2019Audio-Transducer für In-Ear Anwendungen auf der Basis CMOS-kompatibler, elektrostatischer Biegeaktoren
Spitz, Barbara; Wall, Franziska; Schenk, Hermann; Melnikov, Anton; Ehrig, Lutz; Langa, Sergiu; Stolz, Michael; Kaiser, Bert; Conrad, Holger; Schenk, Harald
Conference Paper
2019Ein Beitrag zum Entwurf vibrationsbelasteter Microscanner
Kiethe, Oliver
: Janschek, Klaus; Schroedter, Richard (Betreuer); Todt, Ulrich (Betreuer)
Thesis
2019Characterisation of ferroelectric thin films with scanning probe microscope methods
Norouzi Kalkani, Mahsa
: Kämpfe, Thomas (Betreuer); Ecke, Ramona (Betreuer); Schulz, Stefan E. (Gutachter)
Master Thesis
2019CMOS-compatible transition metal disilicide for integrated thermoelectric applications
Nichenametla, C.K.; Calvo, J.; Dhavamani, A.; Drescher, M.; Göhler, T.; Wagner-Reetz, M.
Journal Article
2019CMUT with mechanically coupled plate actuators - Linearized electrostatic modeling
Krenkel, Marcel; Koch, Sandro; Kupnik, M.
Conference Paper
2019CMUT with mechanically coupled plate actuators for low frequencies
Krenkel, Marcel; Stolz, Michael; Koch, Sandro G.; Kupnik, Mario
Journal Article
2019Co-MOCVD processed seed layer for through silicon via copper metallization
Esmaeili, S.; Lilienthal, K.; Nagy, N.; Gerlich, L.; Krause, R.; Uhlig, B.
Journal Article
2019Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers
Kaisers, B.; Langa, S.; Ehrig, L.; Stolz, M.; Schenk, H.; Conrad, H.; Schenk, H.; Schimmanz, K.; Schuftenhauer, D.
Journal Article
2019Construction and Characterization of External Cavity Diode Lasers Based on a Microelectromechanical System Device
Hoppe, M.; Jiménez, A.; Rohling, H.; Schmidtmann, S.; Grahmann, J.; Tatenguem, H.; Milde, T.; Schanze, T.; Sacher, J.R.
Journal Article
2019Defects in oxidized p-type Si wafers observed by surface photovoltage spectroscopy
Kolkovsky, Vladimir
Journal Article
2019Design and fabrication of liquid crystal microring resonator-based tunable optical add-drop filters
Costache, Florenta; Hartwig, H.; Martin, A.; Blasl, M.; Rieck, A.; Namdari, M.
Conference Paper
2019Development of an illumination module for stroboscopic phase-shift interferometry on MEMS devices
Medeiros Ventura, Luiz Guilherme de; Wolschke, Steffen; Skupsch, Christoph; Berndt, D.
Conference Paper
2019Device and method for generating a key
Blasl, Martin; Costache, Florenta
Patent
2019Doping hafnium oxide by in-situ precursor mixing
Weinreich, Wenke; Mart, Clemens; Kühnel, Kati; Kämpfe, Thomas; Czernohorsky, Malte
Presentation
2019Electrical and structural properties of direct current magnetron sputtered amorphous TiAl thin films
Kolkovsky, V.; Schmidt, Jan-Uwe; Döring, S.
Journal Article
2019Electrocaloric temperature change in ferroelectric Si-doped hafnium oxide (HfO2) thin films
Mart, C.; Kämpfe, T.; Pätzold, B.; Rudolph, M.; Czernohorsky, M.; Müller, J.; Weinreich, W.
Presentation
2019Electrocaloric temperature change in ferroelectric Si-doped hafnium oxide (HfO2) thin films
Mart, Clemens; Kämpfe, Thomas; Müller, Johannes; Pätzold, Björn; Rudolph, Matthias; Czernohorsky, Malte; Weinreich, Wenke
Presentation
2019Electrostatic All-Silicon MEMS Speakers for In-Ear Audio Applications - Acoustic Measurements and Modelling Approach
Ehrig, Lutz; Wall, Franziska; Schenk, Hermann; Langa, Sergiu; Melnikov, Anton; Stolz, Michael; Kaiser, Bert; Conrad, Holger; Schenk, Harald
Conference Paper
2019Entwurf eines analogen Hochgeschwindigkeits-Frontends für die optische drahtlose Kommunikation
Spundflasche, Martin
: Gärtner, Uwe (Prüfer); Noack, Alexander (Gutachter); Kirrbach, René (Gutachter)
Bachelor Thesis
2019Epitaxial n++-InGaAs ultra-shallow junctions for highly scaled n-MOS devices
Tejedor, P.; Drescher, M.; Vázquez, L.; Wilde, L.
Journal Article
2019Ferroelectric and pyroelectric properties of polycrystalline La-doped HfO2 thin films
Mart, Clemens; Kühnel, Kati; Kämpfe, Thomas; Zybell, Sabine; Weinreich, Wenke
Journal Article
2019Formation of highly conformal spinel lithium titanate thin films based on a novel three-step atomic layer deposition process
Bönhardt, S.; Kühnel, K.; Kia, A.M.; Weinreich, W.
Journal Article
2019Fraunhofer Institute for Photonic Microsystems. Annual Report 2018
 
Annual Report
2019Functional carbon nanotubes for MEMS applications: Miniaturized strain sensor and black coating for infrared devices
Böttger, S.; Bonitz, J.; Al-Falahi, F.; Schulz, S.E.; Hermann, S.
Conference Paper
2019Gate Stack Optimization Toward Disturb-Free Operation of Ferroelectric HSO based FeFET for NAND Applications
Seidel, K.; Ali, T.; Hoffmann, R.; Kühnel, K.; Czernohorsky, M.; Rudolph, M.; Pätzold, B.; Steinke, P.; Zimmermann, K.; Biedermann, K.; Houdt, J. van
Conference Paper
2019Glow discharge optical emission spectrometry for quantitative depth profiling of CIGS thin-films
Kodalle, T.; Greiner, D.; Brackmann, V.; Prietzel, K.; Scheu, A.; Bertram, T.; Reyes-Figueroa, P.; Unold, T.; Abou-Ras, D.; Schlatmann, R.; Kaufmann, C.A.; Hoffmann, V.
Journal Article
2019High-density energy storage in Si-doped hafnium oxide thin films on area-enhanced substrates
Kühnel, Kati; Czernohorsky, M.; Riedel, Steffen; Mart, Clemens; Weinreich, Wenke
Journal Article
2019Hybrid assembled MEMS scanner array with large aperture for fast scanning LIDAR systems
Sandner, Thilo; Grasshoff, Thomas; Wildenhain, Michael; Schwarzenberg, M.
Journal Article
2019Impedanzanpassungsvorrichtung, Wandlervorrichtung und Verfahren zum Herstellen einer Impedanzanpassungsvorrichtiung
Schweiger, Severin; Koch, Sandro; Grafe, Mario; Lange, Nicolas; Amelung, Jörg
Patent
2019Influence of the dose assignment and fracturing type on patterns exposed by a variable shaped e-beam writer: Simulation vs experiment
Brackmann, V.; Friedrich, M.; Browning, C.; Hanisch, N.; Uhlig, B.
Conference Paper
2019Inkjet printed adhesives for advanced M(O)EMS packaging
Roshanghias, A.; Ma, Y.; Gaumont, E.; Neumaier, L.
Journal Article
2019Integration of complex miniaturized optical systems by place and bend assembly
Grüger, H.; Knobbe, J.; Meyer, S.
Conference Paper
2019Investigation of mechanical and optical properties of 3D printed materials serving as substrate for place and bend assembly
Grüger, H.; Knobbe, J.; Sabiha, M.H.
Conference Paper
2019Investigation of Pt-Salt-Doped-Standalone-Multiwall Carbon Nanotubes for On-Chip Interconnect Applications
Liang, J.; Chen, R.; Ramos, R.; Lee, J.; Okuno, H.; Kalita, D.; Georgiev, V.; Berrada, S.; Sadi, T.; Uhlig, B.; Lilienthal, K.; Dhavamani, A.; Könemann, F.; Gotsmann, B.; Goncalves, G.; Chen, B.; Asenov, A.; Dijon, J.; Todri-Sanial, A.
Journal Article
2019Ionenmobilitätsspektrometer mit FAIMS-Filter in MEMS-Technologie
Graf, Alexander; Hild, Olaf Rüdiger
Conference Paper
2019Kern für Echtzeit
Deicke, Frank; Beck, Monika
Internet Contribution
2019Konzeptentwicklung eines optischen Messplatzes zur präzisen und hochdynamischen Bestimmung des zweidimensionalen Kippwinkels von 2D-Mikrospiegeln als Referenzmesssystem einer Echtzeitregelung
Stolba, Friedrich
: Czarske, Jürgen (Gutachter); Büttner, Lars (Gutachter); Sandner, Thilo (Gutachter)
Thesis
2019Li-Fi for Augmented Reality Glasses: A Proof of Concept
Kirrbach, René; Faulwaßer, Michael; Jakob, Benjamin; Schneider, Tobias
Conference Paper
2019Local crystallographic phase detection and texture mapping in ferroelectric Zr doped HfO2 films by transmission-EBSD
Lederer, M.; Kämpfe, T.; Olivo, R.; Lehninger, D.; Mart, C.; Kirbach, S.; Ali, T.; Polakowski, P.; Roy, L.; Seidel, K.
Journal Article
2019MEMS Aktuator-Array mit Kammantrieb und verbesserter Linearität
Neudert, A.; Felsberg, L.; Dürr, P.
Conference Paper
2019MEMS based NIR spectrometer with extended spectral range
Grüger, H.; Knobbe, J.; Pügner, T.
Conference Paper
2019MEMS mit einem beweglichen Strukturelement und MEMS-Array
Dürr, Peter; Neudert, Andreas
Patent
2019MEMS piston mirror arrays with force-balanced single spring
Dürr, P.; Neudert, A.; Kunze, D.; Friedrichs, M.
Conference Paper
2019Mikroelektromechanisches Bauteil sowie ein Verfahren zu seiner Herstellung
Döring, Sebastian; Friedrichs, Martin; Hürrich, Arnd; Rudloff, Dirk
Patent
2019Monolithisch ausgestalteter Spektralapparat
Grüger, Heinrich; Knobbe, Jens; Pügner, Tino
Patent
2019Multidirektionale Übersetzungs- und Neigungsplattform unter Verwendung von Biegeaktuatoren als aktive Entität
Gaudet, Matthieu; Kaiser, Bert
Patent
2019A Multilevel FeFET Memory Device based on Laminated HSO and HZO Ferroelectric Layers for High-Density Storage
Ali, T.; Olivo, R.; Lederer, M.; Hoffmann, R.; Steinke, P.; Zimmermann, K.; Mühle, U.; Seidel, K.; Müller, J.; Polakowski, P.; Kühnel, K.; Czernohorsky, M.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Lehninger, D.; Müller, F.
Conference Paper
2019Non-rotationally Symmetric Freeform Fresnel-Lenses for Arbitrary Shaped Li-Fi Communication Channels
Kirrbach, René; Faulwaßer, Michael; Jakob, Benjamin
Conference Paper
2019Novel atomic layer deposition of lithium-containing electrode and electrolyte thin films for 3D all-solid-state batteries
Speulmanns, Jan; Bönhardt, Sascha; Kia, Alireza M.; Weinreich, Wenke
Poster
2019Optik für Sende- und/oder Empfangs-Element, Kommunikationsmodul, Arrays aus Kommunikationsmodulen, System aus mehreren Kommunikationsmodulen und Verfahren zur Herstellung einer Optik
Kirrbach, René
Patent
2019Optische Charakterisierungsmethoden von siliziumbasierten MEMS mit verdeckten Strukturen
Stolz, Michael; Mrosk, A.; Kaiser, B.; Langa, S.; Ehrig, L.; Conrad, H.; Gaudet, M.; Schenk, H.
Conference Paper
2019Optische Mikrosysteme für verbesserte Bildgebung in der Biomedizin
Scholles, M.
Conference Paper
2019Platinum-Copper Defects in Silicon
Kolkovsky, V.; Kolkovsky, V.; Weber, J.
Journal Article
2019Principles and Challenges for Binary Oxide Based Ferroelectric Memory FeFET
Ali, T.; Polakowski, P.; Büttner, T.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Hoffmann, R.; Czernohorsky, M.; Kühnel, K.; Steinke, P.; Eng, L.M.; Seidel, K.
Conference Paper
2019Principles and Challenges for Binary Oxide Based Ferroelectric Memory FeFET
Ali, T.; Polakowski, P.; Büttner, T.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Hoffmann, R.; Czernohorsky, M.; Kühnel, K.; Steinke, P.; Eng, L.M.; Seidel, K.
Poster
2019Pyroelectric Energy Conversion in Doped Hafnium Oxide (HfO2) Thin Films on Area-Enhanced Substrates
Hanrahan, Brendan; Mart, Clemens; Kämpfe, Thomas; Czernohorsky, M.; Weinreich, Wenke; Smith, A.
Journal Article
2019Quasi-statischer MOEMS-Gitterscanner zum spektralen Durchstimmen eines MIR-Quantenkaskadenlasers
Merten, André; Schroedter, Richard; Dreyhaupt, André; Graßhoff, Thomas; Schwarzenberg, Markus; Hugger, Stefan; Schilling, Christian; Grahmann, Jan; Ostendorf, Ralf
Journal Article
2019Rasterscan mit ruckbegrenzten Trajektorien für quasi-statisch/resonante Mikroscanner
Schroedter, Richard; Schwarzenberg, Markus; Janschek, K.; Grahmann, Jan
Conference Paper
2019Reduced metal contamination from crucible and coating using a silicon nitride based diffusion barrier for the growth of cast quasi-single crystalline silicon ingots
Wolny, F.; Krause, A.; Müller, M.; Fischer, G.; Neuhaus, H.
Journal Article
2019Sensoranordnung und Verfahren zum Herstellen einer Sensoranordnung
Mart, Clemens; Polakowski, Patrick; Kämpfe, Thomas; Weinreich, Wenke
Patent
2019Separation of Individual Thermal Double-Donor Levels by Laplace Deep-Level Transient Spectroscopy
Gwozdz, K.; Kolkovsky, V.; Weber, J.
Journal Article
2019Silicone oil damping for quasi-static micro scanners with electrostatic vertical staggered comb drives
Schroedter, Richard; Grahmann, Jan; Janschek, Klaus
Journal Article
2019Small-signal modeling of mm-wave MOSFET up to 110 GHz in 22nm FDSOI technology
Le, Q.H.; Huynh, D.K.; Wang, D.; Kämpfe, T.; Rudolph, M.
Conference Paper
2019Solid-State LiDAR: Umgebungssensorik für sicheres autonomes Fahren
Amelung, J.; Galle, C.
Conference Paper
2019Spektralanalysesystem zum Aufnehmen eines Spektrums
Knobbe, Jens; Grüger, Heinrich
Patent
2019Spektralanalysesystem, mobiles Gerät mit einem Spektralanalysesystem, ein Verfahren zur Bestimmung einer Korrekturfunktion zur Abbildungskorrektur eines durch ein Spektralanalysesystem aufgenommenen Spektrums und Computerprogramm
Knobbe, Jens; Grüger, Heinrich
Patent
2019Structure and Thermoelectric Properties of CoSi-Based Film Composites
Kuznetsova, V.S.; Novikov, S.V.; Nichenametla, C.K.; Calvo, J.; Wagner-Reetz, M.
Journal Article
2019Studentische Beschäftigungsverhältnisse als Quelle des Active Sourcings? Eine Analyse am Beispiel des Fraunhofer-Instituts für Photonische Mikrosysteme IPMS
Wendenburg, Anja
: Haubold, Anne-Katrin (Gutachter); Richter, Thorsten S. (Gutachter)
Bachelor Thesis
2019Study of sub-volume activation in CoFeB/MgO memory devices near spin reorientation transition
Fidalgo, João; Lv, Hua; Silva, Ana V.; Leitão, Diana C.; Kämpfe, Thomas; Langer, Juergen; Wrona, Jerzy; Ocker, Berthold; Cardoso, Susana
Poster
2019Theory and Experiment of Antiferroelectric (AFE) Si-Doped Hafnium Oxide (HSO) Enhanced Floating-Gate Memory
Ali, T.; Polakowski, P.; Büttner, T.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Hoffmann, R.; Czernohorsky, M.; Kühnel, K.; Steinke, P.; Zimmermann, K.; Biedermann, K.; Eng, L.M.; Seidel, K.; Müller, J.
Journal Article
2019ToF-SIMS 3D Analysis of Thin Films Deposited in High Aspect Ratio Structures via Atomic Layer Deposition and Chemical Vapor Deposition
Kia, A.M.; Haufe, N.; Esmaeili, S.; Mart, C.; Utriainen, M.; Puurunen, R.L.; Weinreich, W.
Journal Article
2019Verfahren zum Herstellen eines mikroelektronischen Systems mit funktionalen Dünnschichten
Riedel, Stefan; Weinreich, Wenke
Patent
2019Wetting properties of LIPSS structured silicon surfaces
Varlamova, O.; Reif, J.; Stolz, M.; Borcia, R.; Borcia, I.D.; Bestehorn, M.
Journal Article
201810 Gbit/s bidirectional transceiver with monolithic optic for rotary connector replacements
Faulwaßer, M.; Kirrbach, R.; Schneider, T.; Noack, A.
Conference Paper
201814nm Ferroelectric FinFET technology with steep subthreshold slope for ultra low power applications
Krivokapic, Z.; Rana, U.; Galatage, R.; Razavieh, A.; Aziz, A.; Liu, J.; Shi, J.; Kim, H.J.; Sporer, R.; Serrao, C.; Busquet, A.; Polakowski, P.; Müller, J.; Kleemeier, W.; Jacob, A.; Brown, D.; Knorr, A.; Carter, R.; Banna, S.
Conference Paper
20183D Analysis of Thin Layers by ToF-SIMS
Mohammadian Kia, Alireza; Esmaeili, Sajjad; Mart, Clemens; Utriainen, Mikko; Haufe, Nora; Puurunen, Riikka L.; Weinreich, Wenke
Poster
2018Advances in MOEMS technologies for high quality imaging systems
Schenk, H.; Wagner, M.; Grahmann, J.; Merten, A.
Conference Paper
2018Aktoren auf Basis elektroaktiver Polymer/Nanopartikel Komposite und deren Anwendung in einer Mikrolinse mit variablem Fokus
Pawlik, Boscij
: Lakner, Hubert (Betreuer); Grabmaier, Anton (Betreuer)
Dissertation
2018Analog frontend for ultra low power 60-GHz RFID tag for back-scattering communication
Harutyunyan, A.
Conference Paper
2018Aspects of high aspect ratio silicon etching - capacitor application
Rudolph, Matthias; Pätzold, Björn; Czernohorsky, Malte
Presentation
2018Automatic tracking of Li-Fi links for wireless industrial ethernet
Kirrbach, René; Faulwaßer, Michael; Schneider, Tobias; Ostermann, Robert; Noack, Alexander
Conference Paper
2018Automatic Tracking of Li-Fi Links for Wireless Industrial Ethernet
Kirrbach, René
Conference Paper
2018Barrier breakdown mechanism in nano-scale perpendicular magnetic tunnel junctions with ultrathin MgO barrier
Lv, Hua; Leitao, Diana C.; Hou, Zhiwei; Freitas, Paulo P.; Cardoso, Susana; Kämpfe, Thomas; Müller, Johannes; Langer, Juergen; Wrona, Jerzy
Journal Article
2018Bringing NIR spectrometers into mobile phones
Reinig, P.; Grüger, H.; Knobbe, J.; Pügner, T.; Meyer, S.
Conference Paper
2018Carbon-hydrogen-related complexes in Si
Kolkovsky, V.; Stübner, Ronald; Gwozdz, K.; Weber, Jörg
Journal Article
2018Challenges and Progress on Carbon Nanotube Integration for BEOL Interconnects
Uhlig, B.; Dhavamani, A.; Nagy, N.; Lilienthal, K.; Liske, R.; Ramos, R.; Dijon, J.; Okuno, H.; Kalita, D.; Lee, J.; Georgiev, V.; Asenov, A.; Amoroso, S.; Wang, L.; Koenemann, F.; Gotsmann, B.; Goncalves, G.; Chen, B.; Liang, J.; Pandey, R.R.; Chen, R.; Todri-Sanial, A.
Conference Paper
2018Charakterisierung und Bewertung von CuPc-basierten OFET's im Hinblick auf eine Anwendung als NO2-Sensor
Reichelt, Christoph
: Zipser, Stephan (Betreuer); Graf, Alexander (Betreuer)
Bachelor Thesis
2018Clamped-clamped in-plane electrostatic bending actuators in silicon-based microfluidic devices
Uhlig, Sebastian; Gaudet, Matthieu; Langa, Sergiu; Conrad, Holger; Kaiser, Bert; Stolz, Michael; Schenk, Harald
Presentation
2018CMOS compatible pyroelectric applications enabled by doped HfO2 films on deep-trench structures
Mart, Clemens; Weinreich, Wenke; Czernohorsky, Malte; Riedel, Stefan; Zybell, Sabine; Kühnel, Kati
Conference Paper
2018CMOS design of Digital to Analog converters for active matrix Spatial Light Modulator applications
Paramesh, Vidwath
: Presberger, Thomas (Betr.); Horstmann, John Thomas (Betr.)
Master Thesis
2018CMOS-kompatibler MEMS-Lautsprecher für Im-Ohr-Anwendungen
Conrad, Holger; Ehrig, Lutz; Kaiser, Bert; Schenk, Hermann; Schuffenhauer, David; Stolz, Michael; Gaudet, Matthieu; Schenk, Harald
Conference Paper
2018CMUT with mechanically coupled plate actuators
Krenkel, Marcel; Kircher, Marco; Kupnik, Mario; Koch, Sandro
Conference Paper
2018Cobalt integration solutions - integration (R&D accelerator)
Gerlich, Lukas; Wislicenus, Marcus; Koch, Johannes; Dhavamani, Abitha; Esmaeili, Sajjad; Uhlig, Benjamin
Presentation
2018Copper electroplating with polyethylene Glycol. Pt.II. Experimental analysis and determination of model parameters
Yang, Hongliu; Krause, Robert; Scheunert, Christin; Liske, Romy; Uhlig, Benjamin; Preusse, Axel; Dianat, Arezoo; Bobeth, Manfred; Cuniberti, Gianaurelio
Journal Article
2018Design of on-chip RFID transponder antennas
Heinig, Andreas
Conference Paper
2018Design of On-Chip RFID Transponder Antennas
Heinig, Andreas
Conference Paper
2018Development of titanium oxide conformal thin film by atomic layer deposition
Mohammadian Kia, Alireza
Poster
2018Drahtlose Datenübertragung für kurze und lange Strecken. Alternative Li-Fi
Noack, Alexander
Journal Article
2018Electrostatically Driven In-Plane Silicon Micropump for Modular Configuration
Uhlig, Sebastian; Gaudet, Matthieu; Langa, Sergiu; Schimmanz, Klaus; Conrad, Holger; Kaiser, Bert; Schenk, Harald
Journal Article
2018Enhancement of vertical integration density by engineered BSOI wafers
Kaden, C.; Langa, S.; Ludewig, T.; Schönberger, A.; Herrmann, A.; Göbel, A.; Kolkovsky, V.; Jeroch, W.; Pufe, W.
Journal Article
2018Entwicklung eines Beleuchtungsmoduls für stroboskopische, phasenschiebende Interferometrie
Medeiros Ventura, Luiz Guilherme de
: Heitmann, Johannes (Gutachter); Skupsch, Christoph (Gutachter); Wolschke, Steffen (Betreuer)
Master Thesis
2018Entwicklung eines Transmitters mit Hochleistungsleuchtdiode für die optische drahtlose Datenübertragung
Lei, Lei
: Ostermann, Robert (Betreuer); Fischer, Wolf-Joachim (Gutachter)
Thesis
2018A FeFET based super-low-power ultra-fast embedded NVM technology for 22nm FDSOI and beyond
Dünkel, S.; Trentzsch, M.; Richter, R.; Moll, P.; Fuchs, C.; Gehring, O.; Majer, M.; Wittek, S.; Müller, B.; Melde, T.; Mulaosmanovic, H.; Slesazeck, S.; Müller, S.; Ocker, J.; Noack, M.; Löhr, D.-A.; Polakowski, P.; Müller, J.; Mikolajick, T.; Höntschel, J.; Rice, B.; Pellerin, J.; Beyer, S.
Conference Paper
2018Flatness-based open-loop and closed-loop control for electrostatic quasi-static microscanners using jerk-limited trajectory design
Schroedter, Richard; Roth, Matthias; Janschek, Klaus; Sandner, Thilo
Journal Article
2018Fraunhofer Institute for Photonic Microsystems. Annual Report 2017
 
Annual Report
2018Frequency domain analysis of pyroelectric response in silicon-doped hafnium oxide (HfO2) thin films
Mart, Clemens; Czernohorsky, Malte; Zybell, Sabine; Kämpfe, Thomas; Weinreich, Wenke
Journal Article
2018Functional integration - structure-integrated wireless sensor technology targeting smart mechanical engineering applications
Rülke, Steffen; Beyer, Volkhard; Zorn, Wolfgang; Meinig, Marco; Wecker, Julia; Reuter, Danny; Deicke, Frank; Clausner, André; Werner, Thomas
Conference Paper
2018The gateone-project: A digital innovation hub accelerating innovation through ecosystem design and product trajectory
Hamelin, R.; Andrieux, G.; Chartier, I.; Roustom, B.; Healy, T.; Ali, Z.; Legrand, B.; Mayora, K.; Scholles, M.; Guerre, R.
Conference Paper
2018Grundlegende Untersuchungen zur Phasenmodulation von Licht im Subnanometer-Bereich mittels diffraktiver Mikrospiegelarrays
Sicker, Cornelius
: Schenk, Harald; Reif, Jürgen
Dissertation
2018High Endurance Ferroelectric Hafnium Oxide-Based FeFET Memory Without Retention Penalty
Ali, T.; Polakowski, P.; Riedel, S.; Büttner, T.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Seidel, K.; Löhr, D.; Hoffmann, R.; Czernohorsky, M.; Kühnel, K.; Steinke, P.; Calvo, J.; Zimmermann, K.; Müller, J.
Journal Article
2018High-Speed, Cellular Li-Fi HotSpot for Real-Time Applications
Kirrbach, René; Faulwaßer, Michael; Ostermann, Robert; Jakob, Benjamin; Noack, Alexander
Presentation
2018Hydrogen-related defects in Al2O3 layers grown on n-type Si by the atomic layer deposition technique
Kolkovsky, Vladimir; Stübner, Ronald
Journal Article
2018Interaction of hydrogen with hafnium dioxide grown on silicon dioxide by the atomic layer deposition technique
Kolkovsky, Vladimir; Scholz, Sebastian; Kolkovsky, Valery; Schmidt, Jan-Uwe; Heller, Rene
Journal Article
2018Kanalkodierungen in der optisch-drahtlosen Übertragung
Audi, Maher
: Faulwaßer, Michael (Betreuer); Noack, Alexander (Betreuer); Tutsch, Dietmar (Gutachter); Möller, Reinhard (Gutachter)
Master Thesis
2018Knickbares Substrat mit Bauelement
Grüger, Heinrich; Knobbe, Jens; Pügner, Tino
Patent
2018Konzeption und Herstellung von Systemdemonstratoren für miniaturisierte Im-Ohr-Lautsprecher mit drahtlosen Kommunikationsschnittstellen
Horky, Steve
: Kaiser, Bert (Betreuer); Bauer, Reinhard (Betreuer)
Thesis
2018Konzipierung und Umsetzung eines Automotive Ethernet-MAC IP-Cores
Zhu, Hailong
: Hildebrandt, Ralf (Betreuer); Fischer, Wolf-Joachim (Gutachter)
Thesis
2018Layer thickness scaling and wake-up effect of pyroelectric response in Si-doped HfO2
Mart, Clemens; Kämpfe, Thomas; Zybell, Sabine; Weinreich, Wenke
Journal Article
2018Li-Fi für Kurzstrecken. Drahtlose Industriekommunikation
Noack, Alexander
Journal Article
2018Liquid pumping induced by transverse forced vibrations of an elastic beam: A lubrication approach
Borcia, Rodica; Bestehorn, Michael; Uhlig, Sebastian; Gaudet, Matthieu; Schenk, Harald
Journal Article
2018Liquid pumping induced by transverse forced vibrations of an elastic beam: A lubrication approach
Borcia, Rodica; Bestehorn, Michael; Uhlig, Sebastian; Gaudet, Matthieu; Schenk, Harald
Presentation
2018Liquid pumping induced by transverse forced vibrations of an elastic beam: A lubrication approach
Borcia, Rodica; Bestehorn, Michael; Uhlig, Sebastian; Gaudet, Matthieu; Schenk, Harald
Presentation
2018Lithium Detection and Tracking for Solid State Battery Test Stacks
Mohammadian Kia, Alireza; Haufe, Nora; Zybell, Sabine; Bönhardt, Sascha; Kühnel, Kati; Speulmanns, Jan K.; Weinreich, Wenke
Poster
2018LPCVD in-situ doped silicon for thermoelectric applications
Calvo, Jesús; Drescher, Maximilian; Kühnel, Kati; Sauer, Bodo; Müller, Michael; Schmidt, Christian; Boui, Fatima; Völklein, Friedemann; Wagner-Reetz, Maik
Journal Article
2018Mechanically coupled capacitive ultrasonic transducer
Krenkel, Marcel; Lange, Nicolas; Koch, Sandro; Kircher, Marco
Conference Paper
2018MEMS basierte Ultraschallwandler für die Anwendung in flüssigen und gasförmigen Umgebungen und Möglichkeiten der CMOS Integration
Lange, Nicolas; Grafe, Mario; Koch, Sandro; Kaden, Christiane; Schulze, Matthias
Presentation
2018MEMS integration on foundry-fabricated CMOS backplanes
Hohle, Christoph; Schulze, Matthias
Book Article
2018MEMS-Tunable VCSELs-Driven Terahertz Emitters Based on Conventional and Nanoelectrode Photomixers
Haidar, M.T.
Dissertation
2018MEMS-Wandler zum Interagieren mit einem Volumenstrom eines Fluids und Verfahren zum Herstellen desselben
Conrad, Holger; Schenk, Harald
Patent
2018Microoptoelectromechanical systems-based external cavity quantum cascade lasers for real-time spectroscopy
Butschek, Lorenz; Hugger, Stefan; Jarvis, Jan-Philip; Härtelt, Marko; Merten, André; Schwarzenberg, Markus; Grahmann, Jan; Stothard, David; Warden, Matthew; Carson, Christoph; Macarthur, John; Fuchs, Frank; Ostendorf, Ralf; Wagner, Joachim
Journal Article
2018Mikromechanische Bauelemente mit mechanischen Aktuatoren
Conrad, Holger; Gaudet, Matthieu; Schenk, Harald; Uhlig, Sebastian
Patent
2018MMS, MMS-Array, MEMS-Aktuator und Verfahren zum Bereitstellen eines MMS
Dürr, Peter; Friedrichs, Martin; Gehner, Andreas; Kunze, Detlef
Patent
2018Modellbasierter Systementwurf zur Steuerung und Regelung quasi-statischer Mikroscannerspiegel mit elektrostatischem Kammantrieb
Schroedter, Richard
: Hofmann, Wilfried; Janschek, Klaus
Dissertation
2018Modulating complex beams in amplitude and phase using fast tilt-micromirror arrays and phase masks
Roth, M.; Heber, Jörg; Janschek, Klaus
Journal Article
2018Monolithic integration for photonic applications: MEMS on CMOS and functional BSOI
Kaden, Christiane; Schulze, Matthias
Presentation
2018MOSFET threshold Voltage Shift induced by Ion Implantation performed in different Implanters
Kalkovsky, Vladimir; Hürrich, Arnd; Ende, Lutz
Conference Paper
2018New way to realize miniaturized complex optical systems in high volume
Grüger, Heinrich; Knobbe, Jens; Pügner, Tino; Reinig, Peter; Meyer, Sebastian
Conference Paper
2018Novel 512 × 320 Tip-Tilt Micro Mirror Array in a CMOS-Integrated, Scalable Process Technology
Gehner, A.; Dürr, P.; Kunze, D.; Rudloff, D.; Elgner, A.; Heber, J.; Francés, S.; Skupsch, C.; Torlee, H.; Eckert, M.; Friedrichs, M.; Schmidt, J.; Pufe, W.; Döring, S.; Hohle, C.; Schulze, M.; Wagner, M.
Conference Paper
2018A novel electrostatic actuator, the Nano-E-Drive, and its integration in a micropump design
Gaudet, Matthieu
Presentation
2018Optische Anordnung für ein Spektralanalysesystem, Verfahren zu dessen Herstellung und Spektralanalysesystem
Grüger, Heinrich; Knobbe, Jens; Pügner, Tino
Patent
2018Optische Anordnung zur Erzeugung von Lichtfeldverteilungen und Verfahren zum Betrieb einer optischen Anordnung
Heber, Jörg; Janschek, Klaus; Roth, Matthias
Patent
2018Passive RFID sensors - battery-free, wireless pressure measurements
Weder, Andreas; Koch, Sandro; Grätz, Hagen; Kircher, Marco
Presentation
2018Passive sensor transponders - wireless, battery-free sensing with RFID technology
Weder, Andreas
Presentation
2018A physics-based investigation of Pt-salt doped carbon nanotubes for local interconnects
Liang, J.; Ramos, R.; Dijon, J.; Okuno, H.; Kalita, D.; Renaud, D.; Lee, J.; Georgiev, V.P.; Berrada, S.; Sadi, T.; Asenov, A.; Uhlig, B.; Lilienthal, K.; Dhavamani, A.; Könemann, F.; Gotsmann, B.; Goncalves, G.; Chen, B.; Teo, K.; Pandey, R.R.; Todri-Sanial, A.
Conference Paper
2018Plagiatschutz mittels RFID
Holland, Hans-Jürgen
Presentation
2018Progress on carbon nanotube BEOL interconnects
Uhlig, B.; Liang, J.; Lee, J.; Ramos, R.; Dhavamani, A.; Nagy, N.; Dijon, J.; Okuno, H.; Kalita, D.; Georgiev, V.; Asenov, A.; Amoroso, S.; Wang, L.; Millar, C.; Konemann, F.; Gotsmann, B.; Goncalves, G.; Chen, B.; Pandey, R.R.; Chen, R.; Todri-Sanial, A.
Conference Paper
2018Rapid Synthesis of Sub‐10 nm Hexagonal NaYF4‐Based Upconverting Nanoparticles using Therminol® 66
Hesse, J.; Klier, D.T.; Sgarzi, M.; Nsubuga, A.; Bauer, C.; Grenzer, J.; Hübner, R.; Wislicenus, M.; Joshi, T.; Kumke, M.U.; Stephan, H.
Journal Article
2018Reliable high-density energy storage in Si-doped HfO2 thin films on 3D-structures
Kühnel, Kati; Riedel, Stefan; Mart, Clemens; Weinreich, Wenke
Presentation
2018Repetitive nonlinear control for linear scanning micro mirrors
Schroedter, R.; Schwarzenberg, M.; Grahmann, J.; Sandner, T.; Janschek, K.
Conference Paper
2018Research Fab Microelectronics Germany - A novel cooperation concept for jointly technology development
Amelung, J.
Conference Paper
2018A review of acoustic impedance matching methods to validate additive manufactured metamaterial for capacitive micromachined ultrasonic transducers
Schweiger, Severin; Koch, Sandro
Conference Paper
2018Silicon doped hafnium oxide (HSO) and hafnium zirconium oxide (HZO) based FeFET
Ali, T.; Polakowski, P.; Riedel, S.; Büttner, T.; Kämpfe, T.; Rudolph, M.; Pätzold, B.; Seidel, K.; Löhr, D.; Hoffmann, R.; Czernohorsky, M.; Kühnel, K.; Thrun, X.; Hanisch, N.; Steinke, P.; Calvo, J.; Müller, J.
Journal Article
2018Smart and efficient optimization of NED actuators
Schuffenhauer, David; Gaudet, Matthieu; Conrad, Holger
Conference Paper
2018Subnanometer calibration of diffractive micromirror arrays
Sicker, C.; Heber, J.; Berndt, D.
Conference Paper
2018Subnanometer calibration of diffractive micromirror arrays
Sicker, Cornelius; Heber, Jörg; Berndt, Dirk
Presentation
2018System zur Analyse von elektromagnetischer Strahlung und Bauelement zur Herstellung desselben
Grüger, Heinrich; Knobbe, Jens; Pügner, Tino
Patent
2018Towards a compact, portable, handheld device for contactless real-time standoff detection of hazardous substances
Carson, Christopher; Macarthur, John; Warden, Matthew; Stothard, David; Butschek, Lorenz; Hugger, Stefan; Jarvis, Jan-Philip; Härtelt, Marko; Ostendorf, Ralf; Merten, André; Schwarzenberg, Markus; Grahmann, Jan; Ratajczyk, Marcin
Conference Paper
2018Translatory MEMS actuator with wafer level vacuum package for miniaturized NIR Fourier transform spectrometers
Sandner, Thilo; Gaumont, Eric; Grasshoff, Thomas; Auböck, Gerald; Kenda, Andreas; Gisler, Thomas; Langa, Sergiu; Herrmann, Andreas; Grahmann, Jan
Conference Paper
2018Tuning parameters and their impact on ferroelectric hafnium oxide
Polakowski, Patrick; Büttner, Teresa; Ali, Tarek Nadi Ismail; Riedel, Stefan; Kämpfe, Thomas; Seidel, Konrad; Müller, Johannes; Pätzold, Björn
Presentation
2018Ultrathin Lithium Ion Diffusion Barrier for On-Chip 3D All-Solid-State Batteries
Speulmanns, Jan; Zybell, Sabine; Mohammadian Kia, Alireza; Bönhardt, Sascha; Weinreich, Wenke; Liske, Romy
Poster
2018Understanding Electromigration in Cu-CNT Composite Interconnects
Lee, J.; Berrada, S.; Adamu-Lema, F.; Nagy, N.; Georgiev, V.P.; Sadi, T.; Liang, J.; Ramos, R.; Carrillo-Nunez, H.; Kalita, D.; Lilienthal, K.; Wislicenus, M.; Pandey, R.; Chen, B.; Teo, K.B.K.; Goncalves, G.; Okuno, H.; Uhlig, B.; Todri-Sanial, A.; Dijon, J.; Asenov, A.
Journal Article
2018Vertically aligned carbon nanotube films as absorption layers for IR applications
Kini, Mandar; Bonitz, Jens; Müller, Michael; Schulz, Stefan E.; Hermann, Sascha
Conference Paper
2018Vertically integrated modeling of light-induced defects
Laine, H.S.; Vahlman, H.; Haarahiltunen, A.; Jensen, M.A.; Modanese, C.; Wagner, M.; Wolny, F.; Buonassisi, T.; Savin, H.
Conference Paper
2018Vollduplex-Transceiver für die optische drahtlose Hochgeschwindigkeitskommunikation
Faulwaßer, Michael
: Fischer, Wolf-Joachim; Jamshidi, Kambiz; Henker, Matthias
Dissertation
2018Wake-up effect of pyroelectric response in doped HfO2
Mart, Clemens; Kämpfe, Thomas; Zybell, Sabine; Weinreich, Wenke
Abstract