Under CopyrightKallinger, BirgitBirgitKallingerSchlichting, HolgerHolgerSchlichtingKocher, MatthiasMatthiasKocherRommel, MathiasMathiasRommelBerwian, PatrickPatrickBerwian2022-03-154.1.20222021https://publica.fraunhofer.de/handle/publica/41336510.24406/publica-fhg-413365ensemiconductorsilicon carbideUVPLdefectsion implantation670620530Doping-related photoluminescence spectroscopy in 4H-SiCposter