Koidl, P.P.Koidl2022-03-082022-03-081989https://publica.fraunhofer.de/handle/publica/316370An overview is given on the deposition, properties and applications of dense amorphous carbon films with diamondlike properties. Emphasis will be on the condensation of energetic hydrocarbon ions leading to the formation of amorphous hydrogenated carbon (a-C:H) films. Plasma deposition onto biased substrates and the structure and properties of the resulting a-C:H films are discussed.enamorpher Kohlenstoffamorphous carbonphysical propertiesphysikalische Eigenschaftplasma depositionPlasmaabscheidungstructure621667conference paper