High sensitivity nanoscale characterization by local electrode 3-D atom probe microscopy

Rohrmann, UrbanUrbanRohrmannGüth, KonradKonradGüthGassmann, JürgenJürgenGassmannStauber, RudolfRudolfStauber2022-03-152022-03-152019https://publica.fraunhofer.de/handle/publica/412519enHigh sensitivity nanoscale characterization by local electrode 3-D atom probe microscopyconference paper