Drost, S.S.DrostEndres, H.-E.H.-E.EndresHutter, F.F.Hutter2022-03-082022-03-081990https://publica.fraunhofer.de/handle/publica/317575encapacitive gas sensordielectric gas sensorheteropolysiloxaneIDCimpedance spectroscopyinterdigital capacitormicro system technologySO2Impedance spectroscopy at dielectric gassensorsconference paper