Enderlein, TomTomEnderleinNestler, J.J.NestlerOtto, ThomasThomasOttoGeßner, ThomasThomasGeßner2022-03-132022-03-132015https://publica.fraunhofer.de/handle/publica/3907282-s2.0-84976286551enFabrication of micro needle arrays using an ultra short pulse laserconference paper