Process development for nanoimprint at Fraunhofer IISB

Under CopyrightFader, RobertRobertFaderRumler, MaximilianMaximilianRumlerScharin, MarinaMarinaScharinFörthner, MichaelMichaelFörthnerRommel, MathiasMathiasRommel2022-03-1210.4.20152014https://publica.fraunhofer.de/handle/publica/38700610.24406/publica-fhg-387006en670620530Process development for nanoimprint at Fraunhofer IISBpresentation