Zanke, C.C.ZankeGombert, A.A.GombertErdmann, A.A.ErdmannWeiss, M.M.Weiss2022-03-032022-03-031998https://publica.fraunhofer.de/handle/publica/19252810.1016/S0030-4018(98)00252-1en621697535Fine tuned profile simulation of holographically exposed photoresist gratingsjournal article