Vogel, D.D.VogelKeller, J.J.KellerGollhardt, A.A.GollhardtMichel, B.B.Michel2022-03-092022-03-092002https://publica.fraunhofer.de/handle/publica/34114710.1109/NANO.2002.1032118The paper introduces a measurement method, which allows one to determine the incremental displacement and strain fields from Scanning Force Micrographs of different object states. Local cross correlation algorithms form the basis of the displacement computation. Capabilities and presumptions of the new method are discussed. Application features are demonstrated by the example of microcrack evaluation. Prospects for particle motion tracking by the tool are considered.endisplacementstrain field measurementnanotechnology applicationmeasurement methodincremental displacementscanning force micrographobject statelocal cross correlation algorithmdisplacement computationmicrocrack evaluationparticle motion tracking621conference paper