Reaktive sputtering in roll-to-roll coating machines using rotatable magnetrons

Fahland, MatthiasMatthiasFahlandVogt, TobiasTobiasVogtDimer, MartinMartinDimerKhvostikova, OlgaOlgaKhvostikova2022-03-122022-03-122014https://publica.fraunhofer.de/handle/publica/384697enreactive sputteringroll-to-roll coatingpermeation barrieraluminium oxideReaktive sputtering in roll-to-roll coating machines using rotatable magnetronsconference paper