Amthor, A.A.AmthorHausotte, T.T.HausotteAment, C.C.AmentLi, P.P.LiJäger, G.G.Jäger2022-03-102022-03-102008https://publica.fraunhofer.de/handle/publica/360463This work concerns the modeling and experimental verification of the highly nonlinear friction behavior in positioning on nanometer scale. The main target of this work is to adjust and identify a simple dynamic friction model which allows a model-based estimation of the friction force in combination with the system inertia against displacement. Experiments in the pre-sliding and sliding friction regimes are conducted on an experimental setup. A hybrid two-stage parameter estimation algorithm is used to fit the model parameters based on the experimental data. Finally, the identified friction model is utilized as a model-based feedforward controller combined with a classical feedback controller to compensate the nonlinear friction force and reduce tracking errors.en004670conference paper