Development and electrical characterization of a metal-ferroelectric-insulator semiconductor FET test structure

Under CopyrightHeyns, MarcMüller, JohannesLakner, HubertAli, TarekTarekAli2022-03-0710.12.20162016https://publica.fraunhofer.de/handle/publica/28122410.24406/publica-fhg-281224en621Development and electrical characterization of a metal-ferroelectric-insulator semiconductor FET test structuremaster thesis