Hanke, R.R.HankeNachtrab, F.F.NachtrabBurtzlaff, S.S.BurtzlaffVoland, V.V.VolandUhlmann, N.N.UhlmannPorsch, F.F.PorschJohansson, W.W.Johansson2022-03-112022-03-112009https://publica.fraunhofer.de/handle/publica/36243010.1016/j.nima.2009.03.1512-s2.0-67650108980Structural investigation and characterization of objects below the micrometer-scale level often require either big efforts in experimental setup and critical time schedules as is the case with synchrotron sources or a big effort in test object preparation including destructive methods (e.g. grinding) for the investigation within an electron microscope. The limiting factor for high-resolution imaging with conventional X-ray sources is the focal spot size of the X-ray tube used. Focal spot sizes down to 500nm can be achieved with double-focusing X-ray tubes and transmission targets. To be able to use X-ray transmission imaging for structural investigation with highest resolution in everybody's laboratory, we modified an electron probe micro analyzer (EPMA) to be used as an X-ray source. With this it is possible to obtain electron beam diameters below 200nm and to produce X-rays using a special transmission target. Due to the low X-ray intensity and in order to profit from the high magnification, a high- resolution, low-noise detector is to be used. We chose a Medipix2 detector for that purpose. We will present the setup and first results of radioscopic images with a resolution of about 240 nm.ennanometer-scale X-ray imaginghigh-resolution radioscopynano-material characterization620658670539conference paper