Reimer, K.K.ReimerHofmann, U.U.HofmannJürss, M.M.JürssPilz, W.W.PilzQuenzer, H.J.H.J.QuenzerWagner, B.B.Wagner2022-03-092022-03-091997https://publica.fraunhofer.de/handle/publica/32824610.1117/12.284557en621Fabrication of microrelief surfaces using a one-step lithography processconference paper