Analysis and control of ion beam processing by optical spectroscopy

Heinrich, F.F.HeinrichHoffmann, P.P.Hoffmann2022-03-032022-03-031993https://publica.fraunhofer.de/handle/publica/18236110.1016/0042-207X(93)90169-B2-s2.0-0027553292en621533Analysis and control of ion beam processing by optical spectroscopyjournal article