Zollondz, J.-H.J.-H.ZollondzSchwen, D.D.SchwenNix, A.-K.A.-K.NixTrautmann, C.C.TrautmannBerthold, J.J.BertholdKrauser, J.J.KrauserHofsäss, H.H.Hofsäss2022-03-102022-03-102006https://publica.fraunhofer.de/handle/publica/35274910.1016/j.msec.2005.09.1072-s2.0-33747089951Highly energetic heavy ions with energies of 1 MeV/nucleon or more (e.g. 350 MeV Au ions) result in material modification in matter. The extremely high local energy deposition along the path leads to a material change within a nanoscopic cylinder of about 10 nm throughout the film thickness (up to 30 µm). In diamond-like carbon the material change results in conducting tracks embedded in the insulating material. This is due to a change in the bond structure to a higher sp2 bonding content in the tracks and results in a conductivity change of up to four orders of magnitude. This paper discusses the conductivity mechanism in the 10 nm thick wires and presents a study of the conductivity dependence on the sp3-content in the diamond-like carbon and the used ion species. The conductive tracks are the basis of nanoscopic electronic devices made by irradiation of layered structures.en621671conference paper