Schiller, S.S.SchillerGoedicke, K.K.GoedickeKirchhoff, V.V.KirchhoffKopte, T.T.Kopte2022-03-092022-03-091995https://publica.fraunhofer.de/handle/publica/324804en667670620Pulsed technology - a new era of magnetron sputteringconference paper