Beichele, M.M.BeicheleBauer, A.J.A.J.BauerRyssel, H.H.Ryssel2022-03-032022-03-032001https://publica.fraunhofer.de/handle/publica/19890210.1016/S0026-2714(01)00071-3en670620530621Reliability of ultrathin nitrided oxides grown in low- pressure N2O ambientjournal article