Haeusler, A.A.HaeuslerMeyer, J.-U.J.-U.Meyer2022-03-082022-03-081998https://publica.fraunhofer.de/handle/publica/303875The invention relates to a carbon dioxide sensor comprising a substrate carrier on which a heating element with conductor terminals is attached to the underside and interdigital electrodes are arranged on the upper side and on it a carbon-dioxide-sensitive material, whereby the material mainly consists of CuO and/or TiO<-3 and is designed as a thick film of about 50 - 200 <my>m.de608610620patent1994-4437692