Oehr, C.C.OehrSchindler, B.B.SchindlerVohrer, U.U.VohrerMueller, MichaelMichaelMueller2022-03-082022-03-082001https://publica.fraunhofer.de/handle/publica/304944The invention relates to a process for the modificaiton of flat objects using low-pressure plasma, characterized by the fact that a differential pressure is applied to the reaction chamber between the process gas inlet and the plasma outlet in such a way that the plasma is guided through the flat object.de608610620660patent1994-44262291994-4432919