Szmanda, C.R.C.R.SzmandaBrainard, R.L.R.L.BrainardMackevich, J.F.J.F.MackevichAwaji, A.A.AwajiTanaka, T.T.TanakaYamada, Y.Y.YamadaBohland, J.J.BohlandTedesco, S.S.TedescoDalzotto, B.B.DalzottoBruenger, W.W.BruengerTorkler, M.M.TorklerFallmann, W.W.FallmannLoeschner, H.H.LoeschnerKaesmaier, R.R.KaesmaierNealey, P.M.P.M.NealeyPawloski, A.R.A.R.Pawloski2022-03-032022-03-031999https://publica.fraunhofer.de/handle/publica/19437510.1116/1.591011en621533Measuring acid generation efficiency in chemically amplified resists with all 3 beamsjournal article