Vereshchagina, E.E.VereshchaginaPoppe, E.E.PoppeSchjolberg-Henriksen, K.K.Schjolberg-HenriksenWöhrmann, M.M.WöhrmannMoe, S.S.Moe2022-03-142022-03-142018https://publica.fraunhofer.de/handle/publica/40726510.1109/ESTC.2018.85464222-s2.0-85060048308Thermo-mechanical stability of metal structures is one of the key factors affecting accuracy of micro-electromechanical (MEMS) piezoresistive pressure sensors. In this work, we present the measurement results of stress and hysteresis for the following metals deposited in the same sputtering equipment -Al, Ti, Al-Ti alloy and stacks of Al/Ti films-enabling, for the first time, a direct comparison between their thermo-mechanical properties supported with analysis of surface morphology (grain size, hillocks and voids).en621conference paper