Weinmann, M.M.WeinmannPost, P.P.PostVollmer, H.H.VollmerWanner, R.R.WannerKluge, S.S.KlugeWoias, P.P.Woias2022-03-092022-03-092000https://publica.fraunhofer.de/handle/publica/335866en621Pneumatic silicon microvalves with piezoelectric actuationconference paper