Heming, R.R.HemingWittig, L.-C.L.-C.WittigDannberg, P.P.DannbergJahns, J.J.JahnsKley, E.B.E.B.KleyGruber, M.M.Gruber2022-03-042022-03-042008https://publica.fraunhofer.de/handle/publica/21657610.1109/JLT.2008.919456Design, fabrication, and experimental testing of an integrated microoptical module for interconnection are reported. The systems integration is based on the concept of planar-integrated free-space optics. The module combines diffractive-reflective and refractive microoptics. The diffractive elements were fabricated by binary lithography and reactive ion etching. The refractive elements were made by analog lithography using a high-energy beam sensitive mask and replication in Ormocer. The fabricated module implemented a simple one-dimensional optical interconnect. Two versions were implemented for which insertion losses of approximately 8 and 4.5 dB were measured, respectively.enanalog lithographymicroopticoptical interconnectplanar integrationreplication620535journal article