Pügner, T.T.PügnerKnobbe, J.J.KnobbeLakner, H.H.Lakner2022-03-042022-03-042011https://publica.fraunhofer.de/handle/publica/22621710.1364/AO.50.004894Modern miniaturized scanning grating spectrometers (SGSs) are often based on microelectromechanical system devices. In contrast to classical spectrometers, such systems exhibit additional design constraints, like a symmetrical motion of the grating with a limited deflection. A detailed mathematical analysis of typical SGS configurations based on the grating equation considering these constraints is presented. Equations that relate the basic angles on a scanning grating to the grating properties and the attainable wavelength range of a spectrometer are derived, and the solution set is examined. Furthermore, the analytical description can be used to optimize SGSs with symmetrically moving gratings. The attainable spectral range for a given deflection amplitude of the grating can be calculated. Alternatively, the required grating properties can be determined for a given spectral range.en621535journal article