A novel flow sensor with high time resolution based on differential pressure principle

Richter, M.M.RichterWackerle, L.L.WackerleWoias, P.P.WoiasHillerich, B.B.Hillerich2022-03-092022-03-091999https://publica.fraunhofer.de/handle/publica/33387310.1109/MEMSYS.1999.746783en621A novel flow sensor with high time resolution based on differential pressure principleconference paper