Schenk, C.C.SchenkRisse, S.S.Risse2022-03-102022-03-102005https://publica.fraunhofer.de/handle/publica/348596The study presents theoretical and experimental results of basic investigations on high vacuum compatible gas bearing pads. Mechanical properties at ambient conditions and in a vacuum environment are compared. Differences between the two applications are presented. Pressure distribution is measured in high vacuum environment.enair bearinggas bearingvacuumexhaust620Investigation on gas bearings operable in high vacuum environment for high engineering at nanoscaleconference paper