Under CopyrightFader, R.R.FaderSchmitt, H.H.SchmittRommel, MathiasMathiasRommelBauer, A.J.A.J.BauerFrey, L.L.FreyJi, R.R.JiHornung, M.M.HornungBrehm, M.M.BrehmKraft, A.A.Kraft2022-03-114.9.20122011https://publica.fraunhofer.de/handle/publica/37476310.24406/publica-fhg-374763ensubstrate conformal imprint lithographySCILsoft lithographyUV curing epoxidesPDMS stamp670620530UV-enhanced substrate conformal imprint lithography using an epoxy based polymerposter