Biehl, S.S.BiehlGoericke, F.F.GoerickeWolf, L.L.WolfStaufenbiel, S.S.StaufenbielDelan, A.A.DelanSchultheiß, E.E.Schultheiß2022-03-102022-03-102008https://publica.fraunhofer.de/handle/publica/359084In this work, we report on the suitability of three different sputtered titanium dioxide layers for oxygen detection at low temperatures. It was found that TiO2 -layers deposited by mid-frequency reactive magnetron sputtering were suitable for oxygen sensing at working temperatures as low as 200 °C. The deposition parameters have a big impact on the minimum working temperature and sensitivities of the sensors.entitanium dioxidelow temperature gas detectionoxygen sensing667620670conference paper