Stress gradient and structural properties of the atmospheric and reduced pressure deposited polysilicon layers for micromechanical sensors

Benrakkad, M.S.M.S.BenrakkadVillegas, J.M.J.M.VillegasSamitier, J.J.SamitierMorante, J.R.J.R.MoranteKirsten, M.M.KirstenLange, P.P.Lange2022-03-032022-03-031996https://publica.fraunhofer.de/handle/publica/189132en621537Stress gradient and structural properties of the atmospheric and reduced pressure deposited polysilicon layers for micromechanical sensorsjournal article