Hydrogen content and mechanical stress in glow discharge amorphous silicon

Paduschek, P.P.PaduschekEichinger, P.P.EichingerKristen, G.G.KristenMitlehner, H.H.Mitlehner2022-03-022022-03-021982https://publica.fraunhofer.de/handle/publica/169836enAmorphes SiliziumstressWasserstoffprofilHydrogen content and mechanical stress in glow discharge amorphous siliconjournal article