Size-selective electrostatic sampling and removal of nanoparticles on silicon cantilever sensors for air-quality monitoring

Bertke, M.M.BertkeWu, W.W.WuWasisto, H.S.H.S.WasistoUhde, E.E.UhdePeiner, E.E.Peiner2022-03-132022-03-132017https://publica.fraunhofer.de/handle/publica/39851610.1109/TRANSDUCERS.2017.7994342This paper reports the size-selective sampling and removal of airborne nanoparticles (NP) using a silicon resonant micro cantilever mass balance combined with a miniaturized electrostatic precipitator (ESP). This allows to design an overnight-refreshable, pocket-sized, autarkic monitor for NP mass concentration and size in the range below 300 nm.enresonantbalanceparticulatemassdirect-readingsizerportableoverloading refreshingelectrothermalpiezoresistivein-planeSize-selective electrostatic sampling and removal of nanoparticles on silicon cantilever sensors for air-quality monitoringconference paper