Hädrich, S.S.HädrichEidam, T.T.EidamHoffmann, A.A.HoffmannWunderlich, S.S.WunderlichJansen, F.F.JansenSteil, D.D.SteilMathias, S.S.MathiasLimpert, J.J.Limpert2022-03-142022-03-142018https://publica.fraunhofer.de/handle/publica/406474A commercial 100W turn-key fiber-laser system is used for HHG at 0.5MHz. The source offers record-high photon flux of >4.5·1010 photons/s (68.6eV) or a narrowband harmonic with 8.6·1011 photons/s (26.6eV).en620conference paper