Müller, DanielDanielMüllerBeck, A.A.BeckMassler, HermannHermannMasslerTessmann, AxelAxelTessmannLeuther, ArnulfArnulfLeutherZwick, ThomasThomasZwickKallfass, IngmarIngmarKallfass2022-03-132022-03-132017https://publica.fraunhofer.de/handle/publica/39996710.23919/EuMIC.2017.82306452-s2.0-85045889309To enable beamsteering capabilities for millimeter-wave radar and communication systems, phase shifters are key components. In this paper a WR3-band (220-325 GHz) phase shifter MMIC is presented, which is based on reflective-type phase shifters and enhanced with an integrated variable gain amplifier for loss-compensation, RMS error optimization and antenna tapering. The circuit has an average loss of only 1.6 dB and a 3 dB bandwidth ranging from 218 to 268 GHz. In this frequency range the maximum phase shift is 247° with phase and amplitude RMS errors below 10.4° and 1.5 dB, respectively. The MMIC was processed in a 50 nm InGaAs metamorphic HEMT technology and has a chip size of only 0.75 × 0.75 mm2.en667conference paper