Bruchmann, ClaudiaClaudiaBruchmannAppelfelder, MichaelMichaelAppelfelderBeckert, ErikErikBeckertEberhardt, RamonaRamonaEberhardtTünnermann, AndreasAndreasTünnermann2022-03-112022-03-112012https://publica.fraunhofer.de/handle/publica/37558710.1117/12.9126142-s2.0-84859600869This paper reports on the thermo-mechanical modeling and characterization of a screen printed deformable mirror. The unimorph mirror offers a ceramic LTCC substrate with screen printed PZT layers on its rear surface and a machined copper layer on its front surface. We present the thermo-mechanical model of the deformable mirror based on Ansys multiphysics. The developed mirror design is practically characterized. The homogeneous loading of the optimized design results in a membrane deformation with a rate of -0.2 µm/K, while a laser loading causes a change with a rate of 1.3 µm/W. The proposed mirror design is also suitable to pre-compensate laser generated mirror deformations by homogeneous thermal loading (heating). We experimentally show that a 35 K pre-heating of the mirror assembly could compensate an absorbed laser power of 1.25 W.endeformable mirrorunimorphlaser-induced deformationthermally-induced deformationhomogeneous loadingcompound loading620conference paper