Micro- and nanoreliability research in the micro materials center Chemnitz of Fraunhofer ENAS

Michel, B.B.MichelDudek, R.R.DudekAuersperg, J.J.AuerspergWinkler, T.T.Winkler2022-03-042022-03-042009https://publica.fraunhofer.de/handle/publica/220528en621Micro- and nanoreliability research in the micro materials center Chemnitz of Fraunhofer ENASjournal article