Meyer, N.N.MeyerNestler, K.K.NestlerEngisch, L.L.EngischHeilmann, A.A.HeilmannMarx, G.G.Marx2022-03-032022-03-032000https://publica.fraunhofer.de/handle/publica/19795010.1007/s006040070116A method for analysis of carbon-containing thin films by using surface enhanced Raman spectroscopy (SERS) is described. Thin films of boron nitride or silicon carbide which are deposited on carbon filaments were coated additionally with silver nanoparticles. A very thin plasma polymer film was deposited on the silver particles to give a better long time stability. Using these layers, very intensive carbon band were detected.enraman spectroscopySERScarbonsilverplasmapolymer531620543journal article