Duparre, A.A.DuparreRuppe, C.C.RuppePischow, K.A.K.A.PischowAdamik, M.M.AdamikBarna, P.B.P.B.Barna2022-03-032022-03-031995https://publica.fraunhofer.de/handle/publica/18582210.1016/S0040-6090(94)06505-5Two methods are described of preparing and investigating cross-sections of single layer and multilayer optical coatings by atomic force microscopy (AFM). The first consists of mechanical grinding and polishing followed by a final ion-polishing and etching procedure. The second is simply mechanically fracturing. The results obtained from both preparation methods are compared. In addition, cross-sectional transmission electron microscopy has been used to verify the AFM results.enatomic force microscopyOberflächenmorphologieoptical coatingoptische SchichtRasterkraftmikroskopiesurface morphology620541journal article