Clamping of piezoelectic thin films on substrates: influence of the effective piezoelectric modulus D33

Steinhausen, R.R.SteinhausenHauke, T.T.HaukeSeifert, S.S.SeifertMueller, V.V.MuellerBeige, H.H.BeigeSeifert, S.S.SeifertLoebmann, P.P.LoebmannSporn, D.D.Sporn2022-03-092022-03-091999https://publica.fraunhofer.de/handle/publica/333690en666Clamping of piezoelectic thin films on substrates: influence of the effective piezoelectric modulus D33conference paper