Size dependent sensor response for cobalt oxide-based MEMS pellistors

CC BY 4.0Yurchenko, OlenaOlenaYurchenkoBierer, BenediktBenediktBiererIsserstedt-Trinke, AnnettAnnettIsserstedt-TrinkeJägle, MartinMartinJägleBiermann, SteffenSteffenBiermannWöllenstein, JürgenJürgenWöllenstein2023-02-102023-02-102022https://publica.fraunhofer.de/handle/publica/435711https://doi.org/10.24406/publica-86110.24406/publica-861enMEMS pellistorsSensorsMEMS hotplatesSize dependent sensor response for cobalt oxide-based MEMS pellistorsposter