Acquisition Time Reduction in Large-Area, High-Resolution Scanning Electron Microscopy-Analysis of Nanometer Integrated Circuits Through Deep Learning-Based Super Resolution

Gengenbach, UlrichGieser, HorstErbis, JoschaJoschaErbis2022-03-072022-03-072021https://publica.fraunhofer.de/handle/publica/283689enchip scanningdeep learningsuper-resolutionintegrated circuits621Acquisition Time Reduction in Large-Area, High-Resolution Scanning Electron Microscopy-Analysis of Nanometer Integrated Circuits Through Deep Learning-Based Super Resolutionmaster thesis