Nutsch, A.A.NutschShimizu, H.H.ShimizuEnglmüller, A.A.EnglmüllerFabry, L.L.Fabry2022-03-092022-03-092003https://publica.fraunhofer.de/handle/publica/34248610.1109/ISSM.2003.1243271en670620530Evaluation of aluminum contamination on large-diameter wafers in ULSI fabricationconference paper