Fabrication and electrical characteristics of carbon nanotube-based microcathodes for use in a parallel electron-beam lithography system

Brünger, W.H.W.H.BrüngerEichholz, J.J.EichholzHanssen, H.H.HanssenFriedrich, D.D.Friedrich2022-03-032022-03-032003https://publica.fraunhofer.de/handle/publica/204118en621533Fabrication and electrical characteristics of carbon nanotube-based microcathodes for use in a parallel electron-beam lithography systemjournal article