Grischke, M.M.GrischkeHieke, A.A.HiekeMorgenweck, F.F.MorgenweckDimigen, H.H.Dimigen2022-03-032022-03-031998https://publica.fraunhofer.de/handle/publica/19355310.1016/S0925-9635(97)00237-9Research in recent years has shown that it is possible to combine the well-known properties of diamond-like-carbon coatings (DLC) with a less noticed property, the surface energy. It is known that doping the DLC-matrix with fluorine causes a decrease of the surface energy to 20mN/m. Fluorine-containing DLC-coatings with such low surface energies exhibit a similar behaviour like PTFE. The chemical instability of DLC-coatings with a high fluorine content as well as the environmental discussions about fluorine-containing hydrocarbons have shown the necessity for a new approach to these kind of thin films. This paper presents the variation of the wettability of DLC by modifying it with silicon and the influence of oxygen in silicon-modified DLC. From the tribological research it is known that by doping with silicon a decrease of friction can be achieved. A coating-system which is chemically stable up to temperatures of 270øC and which has PTFE-like properties can also be deposited by dopin g the DLC-matrix with silicon. The properties of silicon-containing DLC-coatings are high hardness and wear resistance combined with a PTFE-like wettability. The silicon-containing DLC-Coatings are twenty times less wear resistance than DLC-coatings, but are ten times more wear resistant compared to uncoated 100r6-steel. The surface energy stretches from 32 mN/m to 22 mN/m.enfluorinesiliconDLCsurface energy667553journal article