Jacobsen, H.H.JacobsenQuenzer, H.-J.H.-J.QuenzerWagner, B.B.WagnerOrtner, K.K.OrtnerJung, T.T.Jung2022-03-102022-03-102006https://publica.fraunhofer.de/handle/publica/35303110.1109/MEMSYS.2006.16277742-s2.0-33750131681en621High-rate sputtering of thick PZT layers for MEMS actuatorsconference paper