Grimme, R.R.GrimmeOtschik, P.P.OtschikGesemann, H.J.H.J.Gesemann2022-03-092022-03-091996https://publica.fraunhofer.de/handle/publica/326870This paper reports on the application of ceramic materials on silicon by using the Sol-Gel technique to the fabrication of sensors and actuators in a microsystem (MicroFab concept). The technology steps are described and tools for serial production are proposed which are less complicated and thereby less expensive than tools for the semiconductor technology so that they could be of interest also for small- and medium-sized companies.enAktorAktuatorKeramikKleinbetriebkleine und mittlere UnternehmenMicroFabMikroFabMikrofabrikationstechnikMikrosystemMikrotechnikMittelbetriebsensorSerienfertigungsiliciumSol-Gel-Schicht666670620conference paper