Under CopyrightGlunz, Stefan W.Stefan W.GlunzSterk, S.S.SterkSteeman, R.R.SteemanWarta, WilhelmWilhelmWartaKnobloch, JensJensKnoblochWettling, WolframWolframWettling2022-03-099.11.20121995https://publica.fraunhofer.de/handle/publica/32568010.24406/publica-fhg-325680In this paper an optimization study for the oxide passivated selective emitter of high-efficiency Silicon solar cells is presented. Results of solar cells with different emitter profiles are compared with measurements of the dark saturation current determined at test structures, which have been processed in parallel. Especially the combined effect of process parameters and surface morphology (e.g. inverted pyramids) is investigated. It was found that optimizations for untextured surfaces can not be directly transferred to textured surfaces. Within this study efficiencies up to 22.3 % have been reached.enconference paper