Melzig, ThomasThomasMelzigAmochkina, TatianaTatianaAmochkinaBruns, StefanStefanBrunsHenning, PhilippPhilippHenningTerhürne, JörgJörgTerhürneTrubetskov, MichaelMichaelTrubetskovVergöhl, MichaelMichaelVergöhl2024-01-192024-01-192024-01-30https://publica.fraunhofer.de/handle/publica/45908710.1016/j.surfcoat.2023.130197The monitoring of thickness evolution during the deposition of optical interference coatings is widely performed by transmittance measurements and continuous comparison with theoretical models. The fitted thickness of the actual layer is influenced by the quality of the signal. Effects from light path, substrate and spectrometers result in deviations because these are often not part of the models. We show an implementation of these unmodeled effects in the fitting algorithms. The outcome of different configurations while coating the same optical filter design is compared. Additionally, the time consumption of these strategies is investigated to verify their suitability for production.enbroadband optical monitoringtransmittancethickness measurementprocess controlmagnetron sputteringoptical coatingjournal article