Under CopyrightGurram, Sanjeev KumarSanjeev KumarGurram2022-03-0713.01.20182017https://publica.fraunhofer.de/handle/publica/28129610.24406/publica-fhg-281296In this work Atomic Layer deposition of niobium and titanium doped ZnO based Transparent Conductive Oxide (TCO) coatings were developed. The fundamentals required for the deposition and doping of ZnO TCOs are discussed. The various opto-electronic properties of the niobium and titanium doped ZnO films were determined and compared. A model was proposed to explain the various changes in the opto-electronic properties of these films.ennanotechnologyindustrial chemistry & chemical engineeringtesting of materialselectronic devices & materialsMaterialwissenschaftNanotechnologieOberflächentechnologieelektronische MaterialienMetrologieMaterialwissenschaftlerOberflächen-TechnologenHalbleiter-PhysikerChemikerelektronische Materialien667doctoral thesis